A thin film magnetoresistive angle detector

C.J.M. Eijkel, Johan W. Wieberdink, J.H.J. Fluitman, T.J.A. Popma, Peter Groot, Henk Leeuwis

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    An overview is given of the results of our research on a contactless angle detector based on the anisotropic magnetoresistance effect (AMR effect) in a permalloy thin film. The results of high-temperature annealing treatment of the pemalloy film are discussed. Such a treatment suppresses the effects of the uniaxial magnetic anisotropy that is present in a permalloy thin film and increases the AMR effect, thus improving the detector signal. The performance of the detector throughout a temperature range of 20 to 120 °C and the results of heat treatment at 125 °C for 1 week have been tested.
    Original languageEnglish
    Pages (from-to)795-798
    Number of pages4
    JournalSensors and actuators. A: Physical
    Issue number1-3
    Publication statusPublished - 1990


    • METIS-112096
    • IR-70333


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