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A thin film magnetoresistive angle detector

  • Kees J.M. Eijkel
  • , Johan W. Wieberdink
  • , Jan H.J. Fluitman
  • , Theo J.A. Popma
  • , Peter Groot
  • , Henk Leeuwis

    Research output: Contribution to journalArticleAcademicpeer-review

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    Abstract

    An overview is given of the results of our research on a contactless angle detector based on the anisotropic magnetoresistance effect (AMR effect) in a permalloy thin film. The results of high-temperature annealing treatment of the pemalloy film are discussed. Such a treatment suppresses the effects of the uniaxial magnetic anisotropy that is present in a permalloy thin film and increases the AMR effect, thus improving the detector signal. The performance of the detector throughout a temperature range of 20 to 120 °C and the results of heat treatment at 125 °C for 1 week have been tested.
    Original languageEnglish
    Pages (from-to)795-798
    Number of pages4
    JournalSensors and Actuators A: Physical
    Volume22
    Issue number1-3
    DOIs
    Publication statusPublished - 1990

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