A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions

S. Imai, M. Tokuyama, S. Hirose, G.J. Burger, Theodorus S.J. Lammerink, J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationIntermag conference 1995
    Place of PublicationSan Antonio, USA
    Pages-
    Number of pages2
    Publication statusPublished - 1 Sep 1995

    Keywords

    • METIS-114128

    Cite this

    Imai, S., Tokuyama, M., Hirose, S., Burger, G. J., Lammerink, T. S. J., & Fluitman, J. H. J. (1995). A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions. In Intermag conference 1995 (pp. -). San Antonio, USA.