A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions

S. Imai, M. Tokuyama, S. Hirose, G.J. Burger, Theodorus S.J. Lammerink, J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationIntermag conference 1995
    Place of PublicationSan Antonio, USA
    Number of pages2
    Publication statusPublished - 1 Sept 1995


    • METIS-114128

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