A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions

S. Imai, M. Tokuyama, S. Hirose, G.J. Burger, Theodorus S.J. Lammerink, J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationIntermag conference 1995
    Place of PublicationSan Antonio, USA
    Pages-
    Number of pages2
    Publication statusPublished - 1 Sep 1995

    Keywords

    • METIS-114128

    Cite this

    Imai, S., Tokuyama, M., Hirose, S., Burger, G. J., Lammerink, T. S. J., & Fluitman, J. H. J. (1995). A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions. In Intermag conference 1995 (pp. -). San Antonio, USA.
    Imai, S. ; Tokuyama, M. ; Hirose, S. ; Burger, G.J. ; Lammerink, Theodorus S.J. ; Fluitman, J.H.J. / A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions. Intermag conference 1995. San Antonio, USA, 1995. pp. -
    @inproceedings{1cf30580f4d944579dd6219262e7ca25,
    title = "A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions",
    keywords = "METIS-114128",
    author = "S. Imai and M. Tokuyama and S. Hirose and G.J. Burger and Lammerink, {Theodorus S.J.} and J.H.J. Fluitman",
    year = "1995",
    month = "9",
    day = "1",
    language = "Undefined",
    pages = "--",
    booktitle = "Intermag conference 1995",

    }

    Imai, S, Tokuyama, M, Hirose, S, Burger, GJ, Lammerink, TSJ & Fluitman, JHJ 1995, A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions. in Intermag conference 1995. San Antonio, USA, pp. -.

    A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions. / Imai, S.; Tokuyama, M.; Hirose, S.; Burger, G.J.; Lammerink, Theodorus S.J.; Fluitman, J.H.J.

    Intermag conference 1995. San Antonio, USA, 1995. p. -.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions

    AU - Imai, S.

    AU - Tokuyama, M.

    AU - Hirose, S.

    AU - Burger, G.J.

    AU - Lammerink, Theodorus S.J.

    AU - Fluitman, J.H.J.

    PY - 1995/9/1

    Y1 - 1995/9/1

    KW - METIS-114128

    M3 - Conference contribution

    SP - -

    BT - Intermag conference 1995

    CY - San Antonio, USA

    ER -

    Imai S, Tokuyama M, Hirose S, Burger GJ, Lammerink TSJ, Fluitman JHJ. A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions. In Intermag conference 1995. San Antonio, USA. 1995. p. -