A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions

S. Imai, M. Tokuyama, S. Hirose, G.J. Burger, Theodorus S.J. Lammerink, J.H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{1cf30580f4d944579dd6219262e7ca25,

title = "A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions",

keywords = "METIS-114128",

author = "S. Imai and M. Tokuyama and S. Hirose and G.J. Burger and Lammerink, \{Theodorus S.J.\} and J.H.J. Fluitman",

year = "1995",

month = sep,

day = "1",

language = "Undefined",

pages = "--",

booktitle = "Intermag conference 1995",

}

TY - GEN

T1 - A thin film piezoelectric impact sensor array fabricated on a silicon slider for measuring head disk interactions

AU - Imai, S.

AU - Tokuyama, M.

AU - Hirose, S.

AU - Burger, G.J.

AU - Lammerink, Theodorus S.J.

AU - Fluitman, J.H.J.

PY - 1995/9/1

Y1 - 1995/9/1

KW - METIS-114128

M3 - Conference contribution

SP - -

BT - Intermag conference 1995

CY - San Antonio, USA

ER -