A three dimensional microflown

Doekle Reinder Yntema, J.W. van Honschoten, H.E. de Bree, Remco J. Wiegerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    10 Citations (Scopus)
    79 Downloads (Pure)

    Abstract

    An integrated three dimensional acoustic particle velocity sensor is realized. The integration of multiple sensors on a single silicon die leads to improvements in terms of better a better reproducible sensor and a very small sensor to sensor distance allowing accurate single point measurements. Initial measurements performed show that three dimensional noise source finding is possible with this sensor.
    Original languageUndefined
    Title of host publicationMicro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
    Place of PublicationLos Alamitos
    PublisherIEEE Computer Society Press
    Pages654-657
    Number of pages4
    ISBN (Print)0-7803-9475-5
    DOIs
    Publication statusPublished - 25 Jan 2006
    Event19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006 - Istanbul, Turkey
    Duration: 22 Jan 200626 Jan 2006
    Conference number: 19

    Publication series

    Name
    ISSN (Print)1084-6999

    Conference

    Conference19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006
    Abbreviated titleMEMS
    CountryTurkey
    CityIstanbul
    Period22/01/0626/01/06

    Keywords

    • EWI-9154
    • METIS-228395
    • IR-54337

    Cite this

    Yntema, D. R., van Honschoten, J. W., de Bree, H. E., Wiegerink, R. J., & Elwenspoek, M. C. (2006). A three dimensional microflown. In Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on (pp. 654-657). Los Alamitos: IEEE Computer Society Press. https://doi.org/10.1109/MEMSYS.2006.1627884