A three dimensional microflown

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

10 Citations (Scopus)
63 Downloads (Pure)

Abstract

An integrated three dimensional acoustic particle velocity sensor is realized. The integration of multiple sensors on a single silicon die leads to improvements in terms of better a better reproducible sensor and a very small sensor to sensor distance allowing accurate single point measurements. Initial measurements performed show that three dimensional noise source finding is possible with this sensor.
Original languageUndefined
Title of host publicationMicro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Place of PublicationLos Alamitos
PublisherIEEE Computer Society Press
Pages654-657
Number of pages4
ISBN (Print)0-7803-9475-5
DOIs
Publication statusPublished - 25 Jan 2006
Event19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006 - Istanbul, Turkey
Duration: 22 Jan 200626 Jan 2006
Conference number: 19

Publication series

Name
ISSN (Print)1084-6999

Conference

Conference19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006
Abbreviated titleMEMS
CountryTurkey
CityIstanbul
Period22/01/0626/01/06

Keywords

  • EWI-9154
  • METIS-228395
  • IR-54337

Cite this

Yntema, D. R., van Honschoten, J. W., de Bree, H. E., Wiegerink, R. J., & Elwenspoek, M. C. (2006). A three dimensional microflown. In Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on (pp. 654-657). Los Alamitos: IEEE Computer Society Press. https://doi.org/10.1109/MEMSYS.2006.1627884
Yntema, Doekle Reinder ; van Honschoten, J.W. ; de Bree, H.E. ; Wiegerink, Remco J. ; Elwenspoek, Michael Curt. / A three dimensional microflown. Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. Los Alamitos : IEEE Computer Society Press, 2006. pp. 654-657
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abstract = "An integrated three dimensional acoustic particle velocity sensor is realized. The integration of multiple sensors on a single silicon die leads to improvements in terms of better a better reproducible sensor and a very small sensor to sensor distance allowing accurate single point measurements. Initial measurements performed show that three dimensional noise source finding is possible with this sensor.",
keywords = "EWI-9154, METIS-228395, IR-54337",
author = "Yntema, {Doekle Reinder} and {van Honschoten}, J.W. and {de Bree}, H.E. and Wiegerink, {Remco J.} and Elwenspoek, {Michael Curt}",
year = "2006",
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Yntema, DR, van Honschoten, JW, de Bree, HE, Wiegerink, RJ & Elwenspoek, MC 2006, A three dimensional microflown. in Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. IEEE Computer Society Press, Los Alamitos, pp. 654-657, 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, Istanbul, Turkey, 22/01/06. https://doi.org/10.1109/MEMSYS.2006.1627884

A three dimensional microflown. / Yntema, Doekle Reinder; van Honschoten, J.W.; de Bree, H.E.; Wiegerink, Remco J.; Elwenspoek, Michael Curt.

Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. Los Alamitos : IEEE Computer Society Press, 2006. p. 654-657.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - A three dimensional microflown

AU - Yntema, Doekle Reinder

AU - van Honschoten, J.W.

AU - de Bree, H.E.

AU - Wiegerink, Remco J.

AU - Elwenspoek, Michael Curt

PY - 2006/1/25

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N2 - An integrated three dimensional acoustic particle velocity sensor is realized. The integration of multiple sensors on a single silicon die leads to improvements in terms of better a better reproducible sensor and a very small sensor to sensor distance allowing accurate single point measurements. Initial measurements performed show that three dimensional noise source finding is possible with this sensor.

AB - An integrated three dimensional acoustic particle velocity sensor is realized. The integration of multiple sensors on a single silicon die leads to improvements in terms of better a better reproducible sensor and a very small sensor to sensor distance allowing accurate single point measurements. Initial measurements performed show that three dimensional noise source finding is possible with this sensor.

KW - EWI-9154

KW - METIS-228395

KW - IR-54337

U2 - 10.1109/MEMSYS.2006.1627884

DO - 10.1109/MEMSYS.2006.1627884

M3 - Conference contribution

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BT - Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on

PB - IEEE Computer Society Press

CY - Los Alamitos

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Yntema DR, van Honschoten JW, de Bree HE, Wiegerink RJ, Elwenspoek MC. A three dimensional microflown. In Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on. Los Alamitos: IEEE Computer Society Press. 2006. p. 654-657 https://doi.org/10.1109/MEMSYS.2006.1627884