A two dimensional analysis of a correlation between the interface nanoroughness and electric current capabilities in LPCVD oxides deposited on polycrystalline silicon

J.H. Klootwijk; C. Cobianu; V. Petrescu; H. van Kranenburg; P.H. Woerlee; Hans Wallinga

A two dimensional analysis of a correlation between the interface nanoroughness and electric current capabilities in LPCVD oxides deposited on polycrystalline silicon

J.H. Klootwijk, C. Cobianu, V. Petrescu, H. van Kranenburg, P.H. Woerlee, Hans Wallinga

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the Semiconductor Interface Specialist Conference
Place of Publication	San Diego
Pages	25-26
Publication status	Published - 8 Dec 1994

Keywords

METIS-113978

Cite this

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title = "A two dimensional analysis of a correlation between the interface nanoroughness and electric current capabilities in LPCVD oxides deposited on polycrystalline silicon",

keywords = "METIS-113978",

author = "J.H. Klootwijk and C. Cobianu and V. Petrescu and {van Kranenburg}, H. and P.H. Woerlee and Hans Wallinga",

year = "1994",

month = dec,

day = "8",

language = "Undefined",

pages = "25--26",

booktitle = "Proceedings of the Semiconductor Interface Specialist Conference",

}

A two dimensional analysis of a correlation between the interface nanoroughness and electric current capabilities in LPCVD oxides deposited on polycrystalline silicon. / Klootwijk, J.H.; Cobianu, C.; Petrescu, V. et al.
Proceedings of the Semiconductor Interface Specialist Conference. San Diego, 1994. p. 25-26.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A two dimensional analysis of a correlation between the interface nanoroughness and electric current capabilities in LPCVD oxides deposited on polycrystalline silicon

AU - Klootwijk, J.H.

AU - Cobianu, C.

AU - Petrescu, V.

AU - van Kranenburg, H.

AU - Woerlee, P.H.

AU - Wallinga, Hans

PY - 1994/12/8

Y1 - 1994/12/8

KW - METIS-113978

M3 - Conference contribution

SP - 25

EP - 26

BT - Proceedings of the Semiconductor Interface Specialist Conference

CY - San Diego

ER -