A two dimensional analysis of a correlation between the interface nanoroughness and electric current capabilities in LPCVD oxides deposited on polycrystalline silicon

J.H. Klootwijk; C. Cobianu; V. Petrescu; H. van Kranenburg; P.H. Woerlee; Hans Wallinga

A two dimensional analysis of a correlation between the interface nanoroughness and electric current capabilities in LPCVD oxides deposited on polycrystalline silicon

J.H. Klootwijk
, C. Cobianu
, V. Petrescu
, H. van Kranenburg
, P.H. Woerlee
, Hans Wallinga

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the Semiconductor Interface Specialist Conference
Place of Publication	San Diego
Pages	25-26
Publication status	Published - 8 Dec 1994

Keywords

METIS-113978

Cite this

@inproceedings{7897629001f543108e3992ba7e135a25,

title = "A two dimensional analysis of a correlation between the interface nanoroughness and electric current capabilities in LPCVD oxides deposited on polycrystalline silicon",

keywords = "METIS-113978",

author = "J.H. Klootwijk and C. Cobianu and V. Petrescu and \{van Kranenburg\}, H. and P.H. Woerlee and Hans Wallinga",

year = "1994",

month = dec,

day = "8",

language = "Undefined",

pages = "25--26",

booktitle = "Proceedings of the Semiconductor Interface Specialist Conference",

}

A two dimensional analysis of a correlation between the interface nanoroughness and electric current capabilities in LPCVD oxides deposited on polycrystalline silicon. / Klootwijk, J.H.; Cobianu, C.; Petrescu, V. et al.
Proceedings of the Semiconductor Interface Specialist Conference. San Diego, 1994. p. 25-26.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A two dimensional analysis of a correlation between the interface nanoroughness and electric current capabilities in LPCVD oxides deposited on polycrystalline silicon

AU - Klootwijk, J.H.

AU - Cobianu, C.

AU - Petrescu, V.

AU - van Kranenburg, H.

AU - Woerlee, P.H.

AU - Wallinga, Hans

PY - 1994/12/8

Y1 - 1994/12/8

KW - METIS-113978

M3 - Conference contribution

SP - 25

EP - 26

BT - Proceedings of the Semiconductor Interface Specialist Conference

CY - San Diego

ER -