A two-dimensional Monte-Carlo model for thin film growth by oblique evaporation: Simulation of two-component systems at the example of Co-Cr 213

S. Muller - pfeiffer, S. Müller-Pfeiffer, H. van Kranenburg, J.C. Lodder

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    Starting from the well-known idea of atomic shadowing during thin film growth (i.e. ballistic aggregation) a two-dimensional computer model is developed which includes surface relaxation by thermally induced surface diffusion and atomic attraction for a two-component system. An attempt was made to link the model interaction energies to real bonding energies in Co-Cr thin films. The model was applied to investigate structural as well as local configuration changes in the aggregates during systematic parameter variations.
    Original languageUndefined
    Pages (from-to)143-153
    Number of pages11
    JournalThin solid films
    Issue number213
    Publication statusPublished - 1991


    • METIS-112359
    • IR-15480
    • SMI-TST: From 2006 in EWI-TST
    • EWI-5598

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