A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators

H. Yagubizade, M. Darvishi, Michael Curt Elwenspoek, Niels Roelof Tas

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

29 Downloads (Pure)

Abstract

A UHF 4th-order band-pass filter (BPF) based on the subtraction of two 2nd-order contour-mode resonators with slightly different resonance frequencies is presented. The resonators consists of a 1 μm pulsed-laser deposited (PLD) lead zirconate titanate (PZT) thin-film on top of a 3 μm silicon (PZT-on-Si). The resonators are actuated in-phase and their outputs are subtracted. Utilizing this technique, the outputs of the resonators are added up constructively while the feed-through signals are eliminated. The BPF presented a bandwidth of approximately 28.6 MHz and more than 30 dB stopband rejection at around 700 MHz.
Original languageUndefined
Title of host publicationThe 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014)
Place of PublicationUSA
PublisherIEEE
Pages1237-1240
Number of pages4
ISBN (Print)978-1-4799-3509-3
DOIs
Publication statusPublished - 26 Jan 2014
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, United States
Duration: 26 Jan 201430 Jan 2014
Conference number: 27

Publication series

Name
PublisherIEEE

Conference

Conference27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Abbreviated titleMEMS
CountryUnited States
CitySan Francisco
Period26/01/1430/01/14

Keywords

  • EWI-24461
  • TST-ACTUATORS
  • RF MEMS
  • IR-90195
  • piezoelectric
  • Band-pass filter
  • METIS-304005
  • PZT

Cite this

Yagubizade, H., Darvishi, M., Elwenspoek, M. C., & Tas, N. R. (2014). A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators. In The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014) (pp. 1237-1240). USA: IEEE. https://doi.org/10.1109/MEMSYS.2014.6765872