A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators

H. Yagubizade; M. Darvishi; Michael Curt Elwenspoek; Niels Roelof Tas

doi:10.1109/MEMSYS.2014.6765872

A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators

H. Yagubizade
, M. Darvishi
, Michael Curt Elwenspoek
, Niels Roelof Tas

Mesoscale Chemical Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

127 Downloads (Pure)

Abstract

A UHF 4th-order band-pass filter (BPF) based on the subtraction of two 2nd-order contour-mode resonators with slightly different resonance frequencies is presented. The resonators consists of a 1 μm pulsed-laser deposited (PLD) lead zirconate titanate (PZT) thin-film on top of a 3 μm silicon (PZT-on-Si). The resonators are actuated in-phase and their outputs are subtracted. Utilizing this technique, the outputs of the resonators are added up constructively while the feed-through signals are eliminated. The BPF presented a bandwidth of approximately 28.6 MHz and more than 30 dB stopband rejection at around 700 MHz.

Original language	Undefined
Title of host publication	The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014)
Place of Publication	USA
Publisher	IEEE
Pages	1237-1240
Number of pages	4
ISBN (Print)	978-1-4799-3509-3
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765872
Publication status	Published - 26 Jan 2014
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, United States Duration: 26 Jan 2014 → 30 Jan 2014 Conference number: 27

Publication series

Name
Publisher	IEEE

Conference

Conference	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Abbreviated title	MEMS
Country/Territory	United States
City	San Francisco
Period	26/01/14 → 30/01/14

Keywords

EWI-24461
TST-ACTUATORS
RF MEMS
IR-90195
piezoelectric
Band-pass filter
METIS-304005
PZT

Access to Document

10.1109/MEMSYS.2014.6765872

06765872

Cite this

@inproceedings{329835b296ea4179b262c94bcfe342c7,

title = "A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators",

abstract = "A UHF 4th-order band-pass filter (BPF) based on the subtraction of two 2nd-order contour-mode resonators with slightly different resonance frequencies is presented. The resonators consists of a 1 μm pulsed-laser deposited (PLD) lead zirconate titanate (PZT) thin-film on top of a 3 μm silicon (PZT-on-Si). The resonators are actuated in-phase and their outputs are subtracted. Utilizing this technique, the outputs of the resonators are added up constructively while the feed-through signals are eliminated. The BPF presented a bandwidth of approximately 28.6 MHz and more than 30 dB stopband rejection at around 700 MHz.",

keywords = "EWI-24461, TST-ACTUATORS, RF MEMS, IR-90195, piezoelectric, Band-pass filter, METIS-304005, PZT",

author = "H. Yagubizade and M. Darvishi and Elwenspoek, \{Michael Curt\} and Tas, \{Niels Roelof\}",

note = "10.1109/MEMSYS.2014.6765872 ; 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 ; Conference date: 26-01-2014 Through 30-01-2014",

year = "2014",

month = jan,

day = "26",

doi = "10.1109/MEMSYS.2014.6765872",

language = "Undefined",

isbn = "978-1-4799-3509-3",

publisher = "IEEE",

pages = "1237--1240",

booktitle = "The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014)",

address = "United States",

}

Yagubizade, H, Darvishi, M, Elwenspoek, MC & Tas, NR 2014, A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators. in The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014). IEEE, USA, pp. 1237-1240, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, California, United States, 26/01/14. https://doi.org/10.1109/MEMSYS.2014.6765872

A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators. / Yagubizade, H.; Darvishi, M.; Elwenspoek, Michael Curt et al.
The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014). USA: IEEE, 2014. p. 1237-1240.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators

AU - Yagubizade, H.

AU - Darvishi, M.

AU - Elwenspoek, Michael Curt

AU - Tas, Niels Roelof

N1 - Conference code: 27

PY - 2014/1/26

Y1 - 2014/1/26

N2 - A UHF 4th-order band-pass filter (BPF) based on the subtraction of two 2nd-order contour-mode resonators with slightly different resonance frequencies is presented. The resonators consists of a 1 μm pulsed-laser deposited (PLD) lead zirconate titanate (PZT) thin-film on top of a 3 μm silicon (PZT-on-Si). The resonators are actuated in-phase and their outputs are subtracted. Utilizing this technique, the outputs of the resonators are added up constructively while the feed-through signals are eliminated. The BPF presented a bandwidth of approximately 28.6 MHz and more than 30 dB stopband rejection at around 700 MHz.

AB - A UHF 4th-order band-pass filter (BPF) based on the subtraction of two 2nd-order contour-mode resonators with slightly different resonance frequencies is presented. The resonators consists of a 1 μm pulsed-laser deposited (PLD) lead zirconate titanate (PZT) thin-film on top of a 3 μm silicon (PZT-on-Si). The resonators are actuated in-phase and their outputs are subtracted. Utilizing this technique, the outputs of the resonators are added up constructively while the feed-through signals are eliminated. The BPF presented a bandwidth of approximately 28.6 MHz and more than 30 dB stopband rejection at around 700 MHz.

KW - EWI-24461

KW - TST-ACTUATORS

KW - RF MEMS

KW - IR-90195

KW - piezoelectric

KW - Band-pass filter

KW - METIS-304005

KW - PZT

U2 - 10.1109/MEMSYS.2014.6765872

DO - 10.1109/MEMSYS.2014.6765872

M3 - Conference contribution

SN - 978-1-4799-3509-3

SP - 1237

EP - 1240

BT - The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014)

PB - IEEE

CY - USA

T2 - 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014

Y2 - 26 January 2014 through 30 January 2014

ER -