Abstract
For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.
Original language | Undefined |
---|---|
Pages (from-to) | 408-412 |
Journal | Sensors and actuators. A: Physical |
Volume | 46-47 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 1995 |
Keywords
- METIS-111742
- IR-14696