Abstract
| Original language | Undefined |
|---|---|
| Pages (from-to) | 408-412 |
| Journal | Sensors and actuators. A: Physical |
| Volume | 46-47 |
| Issue number | 1-3 |
| DOIs | |
| Publication status | Published - 1995 |
Keywords
- METIS-111742
- IR-14696
Cite this
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A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments. / Setiadi, D.; Setiadi, D.; Regtien, Paulus P.L.
In: Sensors and actuators. A: Physical, Vol. 46-47, No. 1-3, 1995, p. 408-412.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments
AU - Setiadi, D.
AU - Setiadi, D.
AU - Regtien, Paulus P.L.
PY - 1995
Y1 - 1995
N2 - For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.
AB - For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.
KW - METIS-111742
KW - IR-14696
U2 - 10.1016/0924-4247(95)81006-4
DO - 10.1016/0924-4247(95)81006-4
M3 - Article
VL - 46-47
SP - 408
EP - 412
JO - Sensors and actuators. A: Physical
JF - Sensors and actuators. A: Physical
SN - 0924-4247
IS - 1-3
ER -