A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments

D. Setiadi; D. Setiadi; Paulus P.L. Regtien

doi:10.1016/0924-4247(95)81006-4

A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments

D. Setiadi, D. Setiadi, Paulus P.L. Regtien

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.

Original language	Undefined
Pages (from-to)	408-412
Journal	Sensors and actuators. A: Physical
Volume	46-47
Issue number	1-3
DOIs	https://doi.org/10.1016/0924-4247(95)81006-4
Publication status	Published - 1995

Keywords

METIS-111742
IR-14696

Cite this

Setiadi, D., Setiadi, D., & Regtien, P. P. L. (1995). A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments. Sensors and actuators. A: Physical, 46-47(1-3), 408-412. https://doi.org/10.1016/0924-4247(95)81006-4

@article{2a2523cc72ed40c382560dcdb12117d9,

title = "A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments",

abstract = "For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.",

keywords = "METIS-111742, IR-14696",

author = "D. Setiadi and D. Setiadi and Regtien, {Paulus P.L.}",

year = "1995",

doi = "10.1016/0924-4247(95)81006-4",

language = "Undefined",

volume = "46-47",

pages = "408--412",

journal = "Sensors and actuators. A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "1-3",

}

TY - JOUR

T1 - A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments

AU - Setiadi, D.

AU - Regtien, Paulus P.L.

PY - 1995

Y1 - 1995

N2 - For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.

AB - For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.

KW - METIS-111742

KW - IR-14696

U2 - 10.1016/0924-4247(95)81006-4

DO - 10.1016/0924-4247(95)81006-4

M3 - Article

VL - 46-47

SP - 408

EP - 412

JO - Sensors and actuators. A: Physical

JF - Sensors and actuators. A: Physical

SN - 0924-4247

IS - 1-3

ER -

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10.1016/0924-4247(95)81006-4

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