A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments

D. Setiadi, D. Setiadi, Paulus P.L. Regtien

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
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Abstract

For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.
Original languageUndefined
Pages (from-to)408-412
JournalSensors and actuators. A: Physical
Volume46-47
Issue number1-3
DOIs
Publication statusPublished - 1995

Keywords

  • METIS-111742
  • IR-14696

Cite this

@article{2a2523cc72ed40c382560dcdb12117d9,
title = "A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments",
abstract = "For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.",
keywords = "METIS-111742, IR-14696",
author = "D. Setiadi and D. Setiadi and Regtien, {Paulus P.L.}",
year = "1995",
doi = "10.1016/0924-4247(95)81006-4",
language = "Undefined",
volume = "46-47",
pages = "408--412",
journal = "Sensors and actuators. A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "1-3",

}

A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments. / Setiadi, D.; Setiadi, D.; Regtien, Paulus P.L.

In: Sensors and actuators. A: Physical, Vol. 46-47, No. 1-3, 1995, p. 408-412.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments

AU - Setiadi, D.

AU - Setiadi, D.

AU - Regtien, Paulus P.L.

PY - 1995

Y1 - 1995

N2 - For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.

AB - For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.

KW - METIS-111742

KW - IR-14696

U2 - 10.1016/0924-4247(95)81006-4

DO - 10.1016/0924-4247(95)81006-4

M3 - Article

VL - 46-47

SP - 408

EP - 412

JO - Sensors and actuators. A: Physical

JF - Sensors and actuators. A: Physical

SN - 0924-4247

IS - 1-3

ER -