A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments

D. Setiadi, D. Setiadi, Paulus P.L. Regtien

    Research output: Contribution to journal › Article › Academic › peer-review

    9 Citations (Scopus)
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    Abstract

    For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.
    Original languageUndefined
    Pages (from-to)408-412
    JournalSensors and actuators. A: Physical
    Volume46-47
    Issue number1-3
    DOIs
    Publication statusPublished - 1995

    Keywords

    • METIS-111742
    • IR-14696

    Cite this

    Setiadi, D. ; Setiadi, D. ; Regtien, Paulus P.L. / A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments. In: Sensors and actuators. A: Physical. 1995 ; Vol. 46-47, No. 1-3. pp. 408-412.
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    abstract = "For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.",
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    Setiadi, D, Setiadi, D & Regtien, PPL 1995, 'A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments', Sensors and actuators. A: Physical, vol. 46-47, no. 1-3, pp. 408-412. https://doi.org/10.1016/0924-4247(95)81006-4

    A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments. / Setiadi, D.; Setiadi, D.; Regtien, Paulus P.L.

    In: Sensors and actuators. A: Physical, Vol. 46-47, No. 1-3, 1995, p. 408-412.

    Research output: Contribution to journal › Article › Academic › peer-review

    TY - JOUR

    T1 - A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments

    AU - Setiadi, D.

    AU - Setiadi, D.

    AU - Regtien, Paulus P.L.

    PY - 1995

    Y1 - 1995

    N2 - For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.

    AB - For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.

    KW - METIS-111742

    KW - IR-14696

    U2 - 10.1016/0924-4247(95)81006-4

    DO - 10.1016/0924-4247(95)81006-4

    M3 - Article

    VL - 46-47

    SP - 408

    EP - 412

    JO - Sensors and actuators. A: Physical

    JF - Sensors and actuators. A: Physical

    SN - 0924-4247

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    ER -

    Setiadi D, Setiadi D, Regtien PPL. A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments. Sensors and actuators. A: Physical. 1995;46-47(1-3):408-412. https://doi.org/10.1016/0924-4247(95)81006-4

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