A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments

D. Setiadi, D. Setiadi, Paulus P.L. Regtien

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    Abstract

    For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.
    Original languageUndefined
    Pages (from-to)408-412
    JournalSensors and actuators. A: Physical
    Volume46-47
    Issue number1-3
    DOIs
    Publication statusPublished - 1995

    Keywords

    • METIS-111742
    • IR-14696

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