A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments

D. Setiadi; D. Setiadi; Paulus P.L. Regtien

doi:10.1016/0924-4247(95)81006-4

A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments

D. Setiadi
, D. Setiadi
, Paulus P.L. Regtien

Research output: Contribution to journal › Article › Academic › peer-review

11 Citations (Scopus)

367 Downloads (Pure)

Abstract

For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.

Original language	Undefined
Pages (from-to)	408-412
Journal	Sensors and Actuators A: Physical
Volume	46-47
Issue number	1-3
DOIs	https://doi.org/10.1016/0924-4247(95)81006-4
Publication status	Published - 1995

Keywords

METIS-111742
IR-14696

Access to Document

10.1016/0924-4247(95)81006-4

Setiadi95vdf

Cite this

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title = "A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments",

abstract = "For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.",

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AU - Setiadi, D.

AU - Regtien, Paulus P.L.

PY - 1995

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N2 - For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.

AB - For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.

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KW - IR-14696

U2 - 10.1016/0924-4247(95)81006-4

DO - 10.1016/0924-4247(95)81006-4

M3 - Article

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EP - 412

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

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