A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption

A.Y. Kovalgin, J. Holleman, G. Iordache

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)
    9 Downloads (Pure)

    Abstract

    We designed a CMOS compatible hot-surface silicon device operating at a power down to sub-μW. It has a pillarshaped structure with a nano-size (10-100 nm) conductive link between the electrodes separated by a SiO2 layer. The device is capable of maintaining a μm-size hot-surface area of several hundred degrees centigrade due to non-radiative recombination of carriers in a thin (13 nm) poly silicon surface layer. Such a device can be used as a light source, a heat source, as well as a sensitive detector of light and heat. As a direct application, we demonstrate the feasibility to perform as an adsorption-desorption sensor, and as a unit for activating chemisorption/decomposition (i.e. micro-reactor).
    Original languageEnglish
    Title of host publicationProceedings of the IEEE Sensors Conference 2005
    Place of PublicationPiscataway, NJ, USA
    PublisherIEEE
    Pages1225-1228
    Number of pages4
    ISBN (Print)0-7803-9056-3
    DOIs
    Publication statusPublished - 31 Oct 2006
    Event2005 IEEE Sensors Conference - Hyatt Regency Irvine, Irvine, United States
    Duration: 31 Oct 20053 Nov 2005
    http://ewh.ieee.org/conf/sensors2005/

    Conference

    Conference2005 IEEE Sensors Conference
    CountryUnited States
    CityIrvine
    Period31/10/053/11/05
    Internet address

    Fingerprint

    hot surfaces
    actuators
    sensors
    silicon
    heat sources
    chemisorption
    CMOS
    surface layers
    light sources
    desorption
    reactors
    decomposition
    heat
    adsorption
    electrodes
    detectors

    Keywords

    • SC-ICS: Integrated Chemical Sensors
    • Silicon
    • Actuators
    • Energy consumption
    • Chemical sensors
    • Electric resistance
    • Temperature sensors
    • Thermal resistance
    • Electrodes
    • Monitoring
    • Gas detectors

    Cite this

    Kovalgin, A. Y., Holleman, J., & Iordache, G. (2006). A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption. In Proceedings of the IEEE Sensors Conference 2005 (pp. 1225-1228). Piscataway, NJ, USA: IEEE. https://doi.org/10.1109/ICSENS.2005.1597927
    Kovalgin, A.Y. ; Holleman, J. ; Iordache, G. / A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption. Proceedings of the IEEE Sensors Conference 2005. Piscataway, NJ, USA : IEEE, 2006. pp. 1225-1228
    @inproceedings{b701c23a65824a7bacbf4384e7b628bc,
    title = "A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption",
    abstract = "We designed a CMOS compatible hot-surface silicon device operating at a power down to sub-μW. It has a pillarshaped structure with a nano-size (10-100 nm) conductive link between the electrodes separated by a SiO2 layer. The device is capable of maintaining a μm-size hot-surface area of several hundred degrees centigrade due to non-radiative recombination of carriers in a thin (13 nm) poly silicon surface layer. Such a device can be used as a light source, a heat source, as well as a sensitive detector of light and heat. As a direct application, we demonstrate the feasibility to perform as an adsorption-desorption sensor, and as a unit for activating chemisorption/decomposition (i.e. micro-reactor).",
    keywords = "SC-ICS: Integrated Chemical Sensors, Silicon, Actuators, Energy consumption, Chemical sensors, Electric resistance, Temperature sensors, Thermal resistance, Electrodes, Monitoring, Gas detectors",
    author = "A.Y. Kovalgin and J. Holleman and G. Iordache",
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    Kovalgin, AY, Holleman, J & Iordache, G 2006, A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption. in Proceedings of the IEEE Sensors Conference 2005. IEEE, Piscataway, NJ, USA, pp. 1225-1228, 2005 IEEE Sensors Conference, Irvine, United States, 31/10/05. https://doi.org/10.1109/ICSENS.2005.1597927

    A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption. / Kovalgin, A.Y.; Holleman, J.; Iordache, G.

    Proceedings of the IEEE Sensors Conference 2005. Piscataway, NJ, USA : IEEE, 2006. p. 1225-1228.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    T1 - A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption

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    AU - Holleman, J.

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    Y1 - 2006/10/31

    N2 - We designed a CMOS compatible hot-surface silicon device operating at a power down to sub-μW. It has a pillarshaped structure with a nano-size (10-100 nm) conductive link between the electrodes separated by a SiO2 layer. The device is capable of maintaining a μm-size hot-surface area of several hundred degrees centigrade due to non-radiative recombination of carriers in a thin (13 nm) poly silicon surface layer. Such a device can be used as a light source, a heat source, as well as a sensitive detector of light and heat. As a direct application, we demonstrate the feasibility to perform as an adsorption-desorption sensor, and as a unit for activating chemisorption/decomposition (i.e. micro-reactor).

    AB - We designed a CMOS compatible hot-surface silicon device operating at a power down to sub-μW. It has a pillarshaped structure with a nano-size (10-100 nm) conductive link between the electrodes separated by a SiO2 layer. The device is capable of maintaining a μm-size hot-surface area of several hundred degrees centigrade due to non-radiative recombination of carriers in a thin (13 nm) poly silicon surface layer. Such a device can be used as a light source, a heat source, as well as a sensitive detector of light and heat. As a direct application, we demonstrate the feasibility to perform as an adsorption-desorption sensor, and as a unit for activating chemisorption/decomposition (i.e. micro-reactor).

    KW - SC-ICS: Integrated Chemical Sensors

    KW - Silicon

    KW - Actuators

    KW - Energy consumption

    KW - Chemical sensors

    KW - Electric resistance

    KW - Temperature sensors

    KW - Thermal resistance

    KW - Electrodes

    KW - Monitoring

    KW - Gas detectors

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    M3 - Conference contribution

    SN - 0-7803-9056-3

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    BT - Proceedings of the IEEE Sensors Conference 2005

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    Kovalgin AY, Holleman J, Iordache G. A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption. In Proceedings of the IEEE Sensors Conference 2005. Piscataway, NJ, USA: IEEE. 2006. p. 1225-1228 https://doi.org/10.1109/ICSENS.2005.1597927