A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption

A.Y. Kovalgin, J. Holleman, G. Iordache

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)
    9 Downloads (Pure)

    Abstract

    We designed a CMOS compatible hot-surface silicon device operating at a power down to sub-μW. It has a pillarshaped structure with a nano-size (10-100 nm) conductive link between the electrodes separated by a SiO2 layer. The device is capable of maintaining a μm-size hot-surface area of several hundred degrees centigrade due to non-radiative recombination of carriers in a thin (13 nm) poly silicon surface layer. Such a device can be used as a light source, a heat source, as well as a sensitive detector of light and heat. As a direct application, we demonstrate the feasibility to perform as an adsorption-desorption sensor, and as a unit for activating chemisorption/decomposition (i.e. micro-reactor).
    Original languageEnglish
    Title of host publicationProceedings of the IEEE Sensors Conference 2005
    Place of PublicationPiscataway, NJ, USA
    PublisherIEEE
    Pages1225-1228
    Number of pages4
    ISBN (Print)0-7803-9056-3
    DOIs
    Publication statusPublished - 31 Oct 2006
    Event2005 IEEE Sensors Conference - Hyatt Regency Irvine, Irvine, United States
    Duration: 31 Oct 20053 Nov 2005
    http://ewh.ieee.org/conf/sensors2005/

    Conference

    Conference2005 IEEE Sensors Conference
    CountryUnited States
    CityIrvine
    Period31/10/053/11/05
    Internet address

    Keywords

    • SC-ICS: Integrated Chemical Sensors
    • Silicon
    • Actuators
    • Energy consumption
    • Chemical sensors
    • Electric resistance
    • Temperature sensors
    • Thermal resistance
    • Electrodes
    • Monitoring
    • Gas detectors

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  • Cite this

    Kovalgin, A. Y., Holleman, J., & Iordache, G. (2006). A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption. In Proceedings of the IEEE Sensors Conference 2005 (pp. 1225-1228). Piscataway, NJ, USA: IEEE. https://doi.org/10.1109/ICSENS.2005.1597927