A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption

A.Y. Kovalgin, J. Holleman, G. Iordache

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)
    10 Downloads (Pure)


    We designed a CMOS compatible hot-surface silicon device operating at a power down to sub-μW. It has a pillarshaped structure with a nano-size (10-100 nm) conductive link between the electrodes separated by a SiO2 layer. The device is capable of maintaining a μm-size hot-surface area of several hundred degrees centigrade due to non-radiative recombination of carriers in a thin (13 nm) poly silicon surface layer. Such a device can be used as a light source, a heat source, as well as a sensitive detector of light and heat. As a direct application, we demonstrate the feasibility to perform as an adsorption-desorption sensor, and as a unit for activating chemisorption/decomposition (i.e. micro-reactor).
    Original languageEnglish
    Title of host publicationProceedings of the IEEE Sensors Conference 2005
    Place of PublicationPiscataway, NJ, USA
    Number of pages4
    ISBN (Print)0-7803-9056-3
    Publication statusPublished - 31 Oct 2006
    Event2005 IEEE Sensors Conference - Hyatt Regency Irvine, Irvine, United States
    Duration: 31 Oct 20053 Nov 2005


    Conference2005 IEEE Sensors Conference
    Country/TerritoryUnited States
    Internet address


    • SC-ICS: Integrated Chemical Sensors
    • Silicon
    • Actuators
    • Energy consumption
    • Chemical sensors
    • Electric resistance
    • Temperature sensors
    • Thermal resistance
    • Electrodes
    • Monitoring
    • Gas detectors


    Dive into the research topics of 'A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption'. Together they form a unique fingerprint.

    Cite this