A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

Jarno Groenesteijn, Meint J. de Boer, Joost C. Lötters, Remco J. Wiegerink

    Research output: Contribution to journalArticleAcademicpeer-review

    6 Citations (Scopus)
    71 Downloads (Pure)

    Abstract

    Many microfluidic devices are made using specialized fabrication processes, limiting the ability to integrate those devices on the same chip. In this paper, a versatile technology platform is presented that allows for integration of many different devices. It provides a method to design channels in a wide range of sizes and shapes with different functionalization options in close proximity to the fluid in the channels. The latter includes release of the channels for thermal isolation or mechanical movement and metal or piezoelectric layers for actuation and read-out. The channel walls are made using silicon-rich silicon nitride to provide durable, strong, chemically inert and thermally stable channels directly below the substrate surface.

    Original languageEnglish
    Article number127
    JournalMicrofluidics and nanofluidics
    Volume21
    Issue number7
    DOIs
    Publication statusPublished - 1 Jul 2017

    Fingerprint

    Silicon
    Silicon nitride
    Microfluidics
    platforms
    Metals
    Fabrication
    fabrication
    Fluids
    Substrates
    microfluidic devices
    actuation
    silicon nitrides
    proximity
    isolation
    chips
    Hot Temperature
    silicon nitride
    fluids
    silicon
    metals

    Keywords

    • Fabrication
    • Microchannel
    • Microfluidic
    • Microfluidic handling system

    Cite this

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    A versatile technology platform for microfluidic handling systems, part I : fabrication and functionalization. / Groenesteijn, Jarno; de Boer, Meint J.; Lötters, Joost C.; Wiegerink, Remco J.

    In: Microfluidics and nanofluidics, Vol. 21, No. 7, 127, 01.07.2017.

    Research output: Contribution to journalArticleAcademicpeer-review

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