A versatile technology platform for microfluidic handling systems, part I: fabrication and functionalization

Jarno Groenesteijn*, Meint J. de Boer, Joost C. Lötters, Remco J. Wiegerink

*Corresponding author for this work

    Research output: Contribution to journalArticleAcademicpeer-review

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    Many microfluidic devices are made using specialized fabrication processes, limiting the ability to integrate those devices on the same chip. In this paper, a versatile technology platform is presented that allows for integration of many different devices. It provides a method to design channels in a wide range of sizes and shapes with different functionalization options in close proximity to the fluid in the channels. The latter includes release of the channels for thermal isolation or mechanical movement and metal or piezoelectric layers for actuation and read-out. The channel walls are made using silicon-rich silicon nitride to provide durable, strong, chemically inert and thermally stable channels directly below the substrate surface.

    Original languageEnglish
    Article number127
    JournalMicrofluidics and nanofluidics
    Issue number7
    Publication statusPublished - 1 Jul 2017



    • Fabrication
    • Microchannel
    • Microfluidic
    • Microfluidic handling system

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