A waveguide material for integrated optical sensors: silicon oxynitride

H. Albers, L.T.H. Hilderink, J.H. Berends, J.H. Berends, Kerstin Worhoff, N.F. van Hulst, Paul Lambeck

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	Undefined
Title of host publication	Proceedings 1996 National Sensor Conference (invited paper)
Place of Publication	Delft
Pages	221-230
Publication status	Published - 20 Mar 1996
Event	1996 National Sensor Conference - Delft, The Netherlands, Delft, Netherlands Duration: 20 Mar 1996 → 21 Mar 1996

Keywords

@inproceedings{ebf4d887512f48589350d23014e1ce21,

title = "A waveguide material for integrated optical sensors: silicon oxynitride",

keywords = "METIS-112748, IR-15866",

author = "H. Albers and L.T.H. Hilderink and J.H. Berends and J.H. Berends and Kerstin Worhoff and {van Hulst}, N.F. and Paul Lambeck",

year = "1996",

month = mar,

day = "20",

language = "Undefined",

pages = "221--230",

booktitle = "Proceedings 1996 National Sensor Conference (invited paper)",

note = "1996 National Sensor Conference ; Conference date: 20-03-1996 Through 21-03-1996",

}

TY - GEN

T1 - A waveguide material for integrated optical sensors: silicon oxynitride

AU - Albers, H.

AU - Hilderink, L.T.H.

AU - Berends, J.H.

AU - Worhoff, Kerstin

AU - van Hulst, N.F.

AU - Lambeck, Paul

PY - 1996/3/20

Y1 - 1996/3/20

KW - METIS-112748

KW - IR-15866

M3 - Conference contribution

SP - 221

EP - 230

BT - Proceedings 1996 National Sensor Conference (invited paper)

CY - Delft

T2 - 1996 National Sensor Conference

Y2 - 20 March 1996 through 21 March 1996

ER -