A waveguide material for integrated optical sensors: silicon oxynitride

H. Albers, L.T.H. Hilderink, J.H. Berends, J.H. Berends, Kerstin Worhoff, N.F. van Hulst, Paul Lambeck

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageUndefined
Title of host publicationProceedings 1996 National Sensor Conference (invited paper)
Place of PublicationDelft
Pages221-230
Publication statusPublished - 20 Mar 1996
Event1996 National Sensor Conference - Delft, The Netherlands, Delft, Netherlands
Duration: 20 Mar 199621 Mar 1996

Conference

Conference1996 National Sensor Conference
CountryNetherlands
CityDelft
Period20/03/9621/03/96
OtherMarch 20-21, 1996

Keywords

  • METIS-112748
  • IR-15866

Cite this

Albers, H., Hilderink, L. T. H., Berends, J. H., Berends, J. H., Worhoff, K., van Hulst, N. F., & Lambeck, P. (1996). A waveguide material for integrated optical sensors: silicon oxynitride. In Proceedings 1996 National Sensor Conference (invited paper) (pp. 221-230). Delft.