A wide band transmission mode spectrometer for diagnosis of EUV sources

J.L.P. Barreaux, M. Bayraktar, H.M.J. Bastiaens, C. Bruineman, B. Vratzov, F. Bijkerk

Research output: Contribution to conferencePosterOther research output

2 Downloads (Pure)
Original languageEnglish
Number of pages1
Publication statusPublished - 5 Oct 2015
Event2015 International Symposium on Extreme Ultraviolet Lithography - MECC Maastricht, Maastricht, Netherlands
Duration: 5 Oct 20157 Oct 2015
https://www.eiseverywhere.com/ehome/130233/296586/?&&internal=1

Conference

Conference2015 International Symposium on Extreme Ultraviolet Lithography
Abbreviated titleEUV Litography
CountryNetherlands
CityMaastricht
Period5/10/157/10/15
Internet address

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