A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges

S. Saravanan, S. Saravanan, Marcel Dijkstra, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageUndefined
Title of host publication16th MME MicroMechanics Europe Workshop
Place of PublicationGöteborg
Pages320-323
Number of pages4
Publication statusPublished - 4 Sep 2005
Event16th MicroMechanics Europe Workshop, MME 2005 - Göteborg, Sweden
Duration: 4 Sep 20056 Sep 2005
Conference number: 16

Workshop

Workshop16th MicroMechanics Europe Workshop, MME 2005
Abbreviated titleMME
CountrySweden
CityGöteborg
Period4/09/056/09/05

Keywords

  • IR-54342
  • METIS-228420

Cite this

Saravanan, S., Saravanan, S., Dijkstra, M., Berenschot, J. W., Krijnen, G. J. M., & Elwenspoek, M. C. (2005). A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges. In 16th MME MicroMechanics Europe Workshop (pp. 320-323). Göteborg.
Saravanan, S. ; Saravanan, S. ; Dijkstra, Marcel ; Berenschot, Johan W. ; Krijnen, Gijsbertus J.M. ; Elwenspoek, Michael Curt. / A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges. 16th MME MicroMechanics Europe Workshop. Göteborg, 2005. pp. 320-323
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title = "A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges",
keywords = "IR-54342, METIS-228420",
author = "S. Saravanan and S. Saravanan and Marcel Dijkstra and Berenschot, {Johan W.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",
year = "2005",
month = "9",
day = "4",
language = "Undefined",
isbn = "9-1631-7553-3",
pages = "320--323",
booktitle = "16th MME MicroMechanics Europe Workshop",

}

Saravanan, S, Saravanan, S, Dijkstra, M, Berenschot, JW, Krijnen, GJM & Elwenspoek, MC 2005, A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges. in 16th MME MicroMechanics Europe Workshop. Göteborg, pp. 320-323, 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden, 4/09/05.

A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges. / Saravanan, S.; Saravanan, S.; Dijkstra, Marcel; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt.

16th MME MicroMechanics Europe Workshop. Göteborg, 2005. p. 320-323.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges

AU - Saravanan, S.

AU - Saravanan, S.

AU - Dijkstra, Marcel

AU - Berenschot, Johan W.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

PY - 2005/9/4

Y1 - 2005/9/4

KW - IR-54342

KW - METIS-228420

M3 - Conference contribution

SN - 9-1631-7553-3

SP - 320

EP - 323

BT - 16th MME MicroMechanics Europe Workshop

CY - Göteborg

ER -

Saravanan S, Saravanan S, Dijkstra M, Berenschot JW, Krijnen GJM, Elwenspoek MC. A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges. In 16th MME MicroMechanics Europe Workshop. Göteborg. 2005. p. 320-323