A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges

S. Saravanan, S. Saravanan, Marcel Dijkstra, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageUndefined
    Title of host publication16th MME MicroMechanics Europe Workshop
    Place of PublicationGöteborg
    Pages320-323
    Number of pages4
    Publication statusPublished - 4 Sep 2005
    Event16th MicroMechanics Europe Workshop, MME 2005 - Göteborg, Sweden
    Duration: 4 Sep 20056 Sep 2005
    Conference number: 16

    Workshop

    Workshop16th MicroMechanics Europe Workshop, MME 2005
    Abbreviated titleMME
    CountrySweden
    CityGöteborg
    Period4/09/056/09/05

    Keywords

    • IR-54342
    • METIS-228420

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