A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges

S. Saravanan, S. Saravanan, Marcel Dijkstra, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageUndefined
    Title of host publication16th MME MicroMechanics Europe Workshop
    Place of PublicationGöteborg
    Pages320-323
    Number of pages4
    Publication statusPublished - 4 Sep 2005
    Event16th MicroMechanics Europe Workshop, MME 2005 - Göteborg, Sweden
    Duration: 4 Sep 20056 Sep 2005
    Conference number: 16

    Workshop

    Workshop16th MicroMechanics Europe Workshop, MME 2005
    Abbreviated titleMME
    CountrySweden
    CityGöteborg
    Period4/09/056/09/05

    Keywords

    • IR-54342
    • METIS-228420

    Cite this

    Saravanan, S., Saravanan, S., Dijkstra, M., Berenschot, J. W., Krijnen, G. J. M., & Elwenspoek, M. C. (2005). A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges. In 16th MME MicroMechanics Europe Workshop (pp. 320-323). Göteborg.
    Saravanan, S. ; Saravanan, S. ; Dijkstra, Marcel ; Berenschot, Johan W. ; Krijnen, Gijsbertus J.M. ; Elwenspoek, Michael Curt. / A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges. 16th MME MicroMechanics Europe Workshop. Göteborg, 2005. pp. 320-323
    @inproceedings{a9098524252749fd878dbe9dd3ce0160,
    title = "A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges",
    keywords = "IR-54342, METIS-228420",
    author = "S. Saravanan and S. Saravanan and Marcel Dijkstra and Berenschot, {Johan W.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",
    year = "2005",
    month = "9",
    day = "4",
    language = "Undefined",
    isbn = "9-1631-7553-3",
    pages = "320--323",
    booktitle = "16th MME MicroMechanics Europe Workshop",

    }

    Saravanan, S, Saravanan, S, Dijkstra, M, Berenschot, JW, Krijnen, GJM & Elwenspoek, MC 2005, A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges. in 16th MME MicroMechanics Europe Workshop. Göteborg, pp. 320-323, 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden, 4/09/05.

    A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges. / Saravanan, S.; Saravanan, S.; Dijkstra, Marcel; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt.

    16th MME MicroMechanics Europe Workshop. Göteborg, 2005. p. 320-323.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    TY - GEN

    T1 - A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges

    AU - Saravanan, S.

    AU - Saravanan, S.

    AU - Dijkstra, Marcel

    AU - Berenschot, Johan W.

    AU - Krijnen, Gijsbertus J.M.

    AU - Elwenspoek, Michael Curt

    PY - 2005/9/4

    Y1 - 2005/9/4

    KW - IR-54342

    KW - METIS-228420

    M3 - Conference contribution

    SN - 9-1631-7553-3

    SP - 320

    EP - 323

    BT - 16th MME MicroMechanics Europe Workshop

    CY - Göteborg

    ER -

    Saravanan S, Saravanan S, Dijkstra M, Berenschot JW, Krijnen GJM, Elwenspoek MC. A1N Thin film unimorph piezoeclectric actuators on plysilicon microbridges. In 16th MME MicroMechanics Europe Workshop. Göteborg. 2005. p. 320-323