@inproceedings{5627f2c05bc24d58a7fd9dd9dc51f704,
title = "Above-CMOS a-Si and CIGS Solar Cells for Powering Autonomous Microsystems",
abstract = "Two types of solar cells are successfully grown on chips from two CMOS generations. The efficiency of amorphous-silicon (a-Si) solar cells reaches 5.2%, copperindium-gallium-selenide (CIGS) cells 7.1%. CMOS functionality is unaffected. The main integration issues: adhesion, surface topography, metal ion contamination, process temperature, and mechanical stress can be resolved while maintaining standard photovoltaic processing.",
keywords = "METIS-279124, EWI-19039, IR-75943",
author = "J. Lu and W. Liu and {van der Werf}, C.H.M. and A.Y. Kovalgin and Y. Sun and R.E.I. Schropp and J. Schmitz",
note = "10.1109/IEDM.2010.5703457 ; 2010 IEEE International Electron Devices Meeting, IEDM 2010, IEDM ; Conference date: 06-12-2010 Through 08-12-2010",
year = "2010",
month = dec,
day = "6",
doi = "10.1109/IEDM.2010.5703457",
language = "English",
isbn = "978-1-4424-7418-5",
publisher = "IEEE Electron Devices Society",
pages = "31.3.1.--31.3.4",
booktitle = "Proceedings of the 2010 IEEE International Electron Devices Meeting (IEDM)",
address = "United States",
}