AC-driven thermal-balance flow sensor

Theodorus S.J. Lammerink, Niels Roelof Tas, J.W. van Honschoten, Gijsbertus J.M. Krijnen, J.J.J. van Baar, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of Transducers Conference 2001
    Pages1448-1451
    Publication statusPublished - 10 Jun 2001
    Event15th European Conference on Solid-State Transducers, Eurosensors XV - Munich, Germany
    Duration: 10 Jun 200114 Jun 2001

    Conference

    Conference15th European Conference on Solid-State Transducers, Eurosensors XV
    CountryGermany
    CityMunich
    Period10/06/0114/06/01

    Keywords

    • METIS-201182
    • IR-42368

    Cite this

    Lammerink, T. S. J., Tas, N. R., van Honschoten, J. W., Krijnen, G. J. M., van Baar, J. J. J., & Elwenspoek, M. C. (2001). AC-driven thermal-balance flow sensor. In Proceedings of Transducers Conference 2001 (pp. 1448-1451)