Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation

R. Coloma Ribera

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 1 Oct 2015
EventX-Ray Metrology Workshop 2015 - Enschede, Netherlands
Duration: 1 Oct 20152 Oct 2015

Conference

ConferenceX-Ray Metrology Workshop 2015
CountryNetherlands
CityEnschede
Period1/10/152/10/15

Keywords

  • METIS-311944

Cite this

Coloma Ribera, R. (2015). Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation. -. Poster session presented at X-Ray Metrology Workshop 2015, Enschede, Netherlands.
Coloma Ribera, R. / Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation. Poster session presented at X-Ray Metrology Workshop 2015, Enschede, Netherlands.
@conference{8014c484c8e748dda6af5a1f22e07e97,
title = "Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation",
keywords = "METIS-311944",
author = "{Coloma Ribera}, R.",
year = "2015",
month = "10",
day = "1",
language = "English",
pages = "--",
note = "X-Ray Metrology Workshop 2015 ; Conference date: 01-10-2015 Through 02-10-2015",

}

Coloma Ribera, R 2015, 'Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation' X-Ray Metrology Workshop 2015, Enschede, Netherlands, 1/10/15 - 2/10/15, pp. -.

Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation. / Coloma Ribera, R.

2015. - Poster session presented at X-Ray Metrology Workshop 2015, Enschede, Netherlands.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation

AU - Coloma Ribera, R.

PY - 2015/10/1

Y1 - 2015/10/1

KW - METIS-311944

M3 - Poster

SP - -

ER -

Coloma Ribera R. Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation. 2015. Poster session presented at X-Ray Metrology Workshop 2015, Enschede, Netherlands.