Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation

R. Coloma Ribera

Research output: Contribution to conferencePoster

Original languageEnglish
Pages-
Publication statusPublished - 1 Oct 2015
EventX-Ray Metrology Workshop 2015 - University of Twente, Enschede, Netherlands
Duration: 1 Oct 20152 Oct 2015

Conference

ConferenceX-Ray Metrology Workshop 2015
CountryNetherlands
CityEnschede
Period1/10/152/10/15

Keywords

  • METIS-311944

Cite this

Coloma Ribera, R. (2015). Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation. -. Poster session presented at X-Ray Metrology Workshop 2015, Enschede, Netherlands.