Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation

R. Coloma Ribera

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 1 Oct 2015
Event	X-Ray Metrology Workshop 2015 - University of Twente, Enschede, Netherlands Duration: 1 Oct 2015 → 2 Oct 2015

Keywords

@conference{8014c484c8e748dda6af5a1f22e07e97,

title = "Accurate determination of oxygen diffusion kinetics for thin film ruthenium oxidation",

keywords = "METIS-311944",

author = "\{Coloma Ribera\}, R.",

year = "2015",

month = oct,

day = "1",

language = "English",

pages = "--",

note = "X-Ray Metrology Workshop 2015 ; Conference date: 01-10-2015 Through 02-10-2015",

}