Active damping elements for improving the accuracy of a microlithography machine

Jan Holterman, Theo J.A. de Vries

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)

    Abstract

    High-precision machines are usually designed according to a limited number of well-known design principles. The dynamic behaviour is optimised mainly by means of proper stiffness management: the design of the mechanical structure is aimed at minimisation of the mass, and maximisation of the stiffness. Damping management is not yet a mature design principle. This is due to the difficulties in designing passive damping mechanisms that do not endanger accuracy. As an example of a vibration problem within an industrial high-precision application, in this paper the need for active damping management in a microlithography machine is discussed. In future, vibrations of the lenses of this machine may pose a practical limit to the accuracy of the lithography process. For that reason, active structural elements have been developed for supporting the lenses. The active elements, consisting of a piezoelectric actuator and a collocated piezoelectric force sensor, are especially suited for implementing robust active damping. The purpose of the present paper is to discuss the conflicting requirements in the mechanical design of the active elements. The discussion is illustrated by means of experimental active damping results that have been obtained on the microlithography machine.
    Original languageEnglish
    Title of host publicationSmart Structures and Materials 2004
    Subtitle of host publicationIndustrial and Commercial Applications of Smart Structures Technologies
    EditorsEric. H. Anderson
    Place of PublicationBellingham, WA
    PublisherSPIE
    Pages20-31
    ISBN (Print)0-8194-5305-6
    DOIs
    Publication statusPublished - 15 Mar 2004

    Publication series

    NameProceedings of SPIE
    PublisherSPIE
    Volume5388
    ISSN (Print)0277-786X

    Keywords

    • Vibration control
    • Stiffness management
    • Damping management
    • Active damping
    • Collocation
    • Piezoelectric actuators
    • Piezoelectric sensors
    • High-precision machines
    • Microlithography

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  • Cite this

    Holterman, J., & de Vries, T. J. A. (2004). Active damping elements for improving the accuracy of a microlithography machine. In E. H. Anderson (Ed.), Smart Structures and Materials 2004: Industrial and Commercial Applications of Smart Structures Technologies (pp. 20-31). (Proceedings of SPIE; Vol. 5388). Bellingham, WA: SPIE. https://doi.org/10.1117/12.538937