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Active multilayer mirrors for reflectance tuning at extreme ultraviolet (EUV) wavelengths
Muharrem Bayraktar, W.A. Wessels, Christopher James Lee, F.A. van Goor, Gertjan Koster, Augustinus J.H.M. Rijnders, Frederik Bijkerk
Research output: Contribution to journal › Article › Academic › peer-review
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