Active vibration control applied to a vacuum pump for high precision equipment

Arthur P. Berkhoff, J.M. Wesselink, T.G.H. Basten

    Research output: Contribution to conferencePaper

    259 Downloads (Pure)

    Abstract

    This paper presents results of a system for active vibration reduction on a setup with a vacuum pump that is tightly coupled with high-precision equipment. The precision of this equipment is critically dependent on the level of the vibrations that are introduced by the vacuum pump. The vibrations were reduced by a recently developed adaptive control scheme in a multi-input multi-output feedback configuration using a sampling rate of 12 kHz. The convergence properties of this algorithm allowed effective tracking of the varying excitation spectrum. Programmable digital minimum-phase reconstruction and anti-aliasing filters at a sampling rate of 100 kHz were used for an optimal tradeoff between sampling errors and phase shift. Effective broadband control was obtained in the frequency range of 100 Hz to 5 kHz, leading to 11.3 dB average broadband reduction on the error sensors.
    Original languageUndefined
    Pages1-8
    Number of pages8
    Publication statusPublished - 26 Oct 2008

    Keywords

    • IR-75924
    • Adaptive control
    • EC Grant Agreement nr.: FP6/501084
    • Active noise and vibration control
    • EWI-19518

    Cite this