Active vibration control applied to a vacuum pump for high precision equipment

Arthur P. Berkhoff, J.M. Wesselink, T.G.H. Basten

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    This paper presents results of a system for active vibration reduction on a setup with a vacuum pump that is tightly coupled with high-precision equipment. The precision of this equipment is critically dependent on the level of the vibrations that are introduced by the vacuum pump. The vibrations were reduced by a recently developed adaptive control scheme in a multi-input multi-output feedback configuration using a sampling rate of 12 kHz. The convergence properties of this algorithm allowed effective tracking of the varying excitation spectrum. Programmable digital minimum-phase reconstruction and anti-aliasing filters at a sampling rate of 100 kHz were used for an optimal tradeoff between sampling errors and phase shift. Effective broadband control was obtained in the frequency range of 100 Hz to 5 kHz, leading to 11.3 dB average broadband reduction on the error sensors.
    Original languageUndefined
    Number of pages8
    Publication statusPublished - 26 Oct 2008
    Event37th International Congress on Noise Control Engineering, Inter-Noise 2008 - Shanghai, China
    Duration: 26 Oct 200829 Oct 2008


    Conference37th International Congress on Noise Control Engineering, Inter-Noise 2008
    Other26-29 October 2008


    • IR-75924
    • Adaptive control
    • EC Grant Agreement nr.: FP6/501084
    • Active noise and vibration control
    • EWI-19518

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