Active vibration control applied to a vacuum pump for high precision equipment

Arthur P. Berkhoff, J.M. Wesselink, T.G.H. Basten

    Research output: Contribution to conferencePaper

    238 Downloads (Pure)

    Abstract

    This paper presents results of a system for active vibration reduction on a setup with a vacuum pump that is tightly coupled with high-precision equipment. The precision of this equipment is critically dependent on the level of the vibrations that are introduced by the vacuum pump. The vibrations were reduced by a recently developed adaptive control scheme in a multi-input multi-output feedback configuration using a sampling rate of 12 kHz. The convergence properties of this algorithm allowed effective tracking of the varying excitation spectrum. Programmable digital minimum-phase reconstruction and anti-aliasing filters at a sampling rate of 100 kHz were used for an optimal tradeoff between sampling errors and phase shift. Effective broadband control was obtained in the frequency range of 100 Hz to 5 kHz, leading to 11.3 dB average broadband reduction on the error sensors.
    Original languageUndefined
    Pages1-8
    Number of pages8
    Publication statusPublished - 26 Oct 2008

    Keywords

    • IR-75924
    • Adaptive control
    • EC Grant Agreement nr.: FP6/501084
    • Active noise and vibration control
    • EWI-19518

    Cite this

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    title = "Active vibration control applied to a vacuum pump for high precision equipment",
    abstract = "This paper presents results of a system for active vibration reduction on a setup with a vacuum pump that is tightly coupled with high-precision equipment. The precision of this equipment is critically dependent on the level of the vibrations that are introduced by the vacuum pump. The vibrations were reduced by a recently developed adaptive control scheme in a multi-input multi-output feedback configuration using a sampling rate of 12 kHz. The convergence properties of this algorithm allowed effective tracking of the varying excitation spectrum. Programmable digital minimum-phase reconstruction and anti-aliasing filters at a sampling rate of 100 kHz were used for an optimal tradeoff between sampling errors and phase shift. Effective broadband control was obtained in the frequency range of 100 Hz to 5 kHz, leading to 11.3 dB average broadband reduction on the error sensors.",
    keywords = "IR-75924, Adaptive control, EC Grant Agreement nr.: FP6/501084, Active noise and vibration control, EWI-19518",
    author = "Berkhoff, {Arthur P.} and J.M. Wesselink and T.G.H. Basten",
    year = "2008",
    month = "10",
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    Active vibration control applied to a vacuum pump for high precision equipment. / Berkhoff, Arthur P.; Wesselink, J.M.; Basten, T.G.H.

    2008. 1-8.

    Research output: Contribution to conferencePaper

    TY - CONF

    T1 - Active vibration control applied to a vacuum pump for high precision equipment

    AU - Berkhoff, Arthur P.

    AU - Wesselink, J.M.

    AU - Basten, T.G.H.

    PY - 2008/10/26

    Y1 - 2008/10/26

    N2 - This paper presents results of a system for active vibration reduction on a setup with a vacuum pump that is tightly coupled with high-precision equipment. The precision of this equipment is critically dependent on the level of the vibrations that are introduced by the vacuum pump. The vibrations were reduced by a recently developed adaptive control scheme in a multi-input multi-output feedback configuration using a sampling rate of 12 kHz. The convergence properties of this algorithm allowed effective tracking of the varying excitation spectrum. Programmable digital minimum-phase reconstruction and anti-aliasing filters at a sampling rate of 100 kHz were used for an optimal tradeoff between sampling errors and phase shift. Effective broadband control was obtained in the frequency range of 100 Hz to 5 kHz, leading to 11.3 dB average broadband reduction on the error sensors.

    AB - This paper presents results of a system for active vibration reduction on a setup with a vacuum pump that is tightly coupled with high-precision equipment. The precision of this equipment is critically dependent on the level of the vibrations that are introduced by the vacuum pump. The vibrations were reduced by a recently developed adaptive control scheme in a multi-input multi-output feedback configuration using a sampling rate of 12 kHz. The convergence properties of this algorithm allowed effective tracking of the varying excitation spectrum. Programmable digital minimum-phase reconstruction and anti-aliasing filters at a sampling rate of 100 kHz were used for an optimal tradeoff between sampling errors and phase shift. Effective broadband control was obtained in the frequency range of 100 Hz to 5 kHz, leading to 11.3 dB average broadband reduction on the error sensors.

    KW - IR-75924

    KW - Adaptive control

    KW - EC Grant Agreement nr.: FP6/501084

    KW - Active noise and vibration control

    KW - EWI-19518

    M3 - Paper

    SP - 1

    EP - 8

    ER -