Active Wafer Table Based on Piezoelectric Thin Films

Ertuğ Şimşek, Stefan Eduard Vries, Bas Jansen, Micha Steur, F. Bijkerk, Muharrem Bayraktar, Marcelo Ackermann

Research output: Contribution to conferencePosterAcademic

Original languageEnglish
Publication statusPublished - 2023
EventNWO Physics 2023 - NH Koningshof, Veldhoven, Netherlands
Duration: 4 Apr 20235 Apr 2023
https://www.nwophysics.nl/

Conference

ConferenceNWO Physics 2023
Country/TerritoryNetherlands
CityVeldhoven
Period4/04/235/04/23
Internet address

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