Adaptation for frequency focusing and increased sensitivity in biomimetic flow sensors using electrostatic spring softening

J. Floris, N. Izadi, R.K. Jaganatharaja, Remco J. Wiegerink, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)
    74 Downloads (Pure)

    Abstract

    This paper presents the results of active adaptation of sensor sensitivity. By applying a DC-bias voltage to the sensing electrodes of a cricket inspired artificial hair sensor the effective spring stiffness can be adapted resulting in a reduced resonance frequency and increased sensitivity. An array of flow sensors was actuated using electrical and acoustical signals at different values of the DC-bias voltage. Characterization was done using a scanning laser vibrometer. Both resonance frequency versus applied DC-bias voltage and deflection-amplitude versus DC-bias voltage behave well in accordance to theory and show that adaptation by DC-biasing can be used for frequency focusing and increasing sensitivity.
    Original languageUndefined
    Title of host publicationProceedings of The 14th International Conference on Solid-State Sensors, Actuators and Microsystems
    Place of PublicationPiscataway
    PublisherIEEE
    Pages1267-1270
    Number of pages4
    ISBN (Print)1-4244-0841-5
    DOIs
    Publication statusPublished - 11 Jun 2007
    Event14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007 - Lyon, France
    Duration: 10 Jun 200714 Jun 2007
    Conference number: 14

    Publication series

    Name
    PublisherIEEE
    NumberLNCS4549

    Conference

    Conference14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007
    Abbreviated titleTRANSDUCERS 2007
    CountryFrance
    CityLyon
    Period10/06/0714/06/07

    Keywords

    • EWI-10850
    • TST-Life like
    • Biomimetic
    • IR-64275
    • flow sensor arrays
    • capacitive
    • METIS-241828
    • Electrostatic spring softening

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