Abstract
This paper presents the results of active adaptation of sensor sensitivity. By applying a DC-bias voltage to the sensing electrodes of a cricket inspired artificial hair sensor the effective spring stiffness can be adapted resulting in a reduced resonance frequency and increased sensitivity. An array of flow sensors was actuated using electrical and acoustical signals at different values of the DC-bias voltage. Characterization was done using a scanning laser vibrometer. Both resonance frequency versus applied DC-bias voltage and deflection-amplitude versus DC-bias voltage behave well in accordance to theory and show that adaptation by DC-biasing can be used for frequency focusing and increasing sensitivity.
Original language | Undefined |
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Title of host publication | Proceedings of The 14th International Conference on Solid-State Sensors, Actuators and Microsystems |
Place of Publication | Piscataway |
Publisher | IEEE |
Pages | 1267-1270 |
Number of pages | 4 |
ISBN (Print) | 1-4244-0841-5 |
DOIs | |
Publication status | Published - 11 Jun 2007 |
Event | 14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007 Conference number: 14 |
Publication series
Name | |
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Publisher | IEEE |
Number | LNCS4549 |
Conference
Conference | 14th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007 |
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Abbreviated title | TRANSDUCERS 2007 |
Country/Territory | France |
City | Lyon |
Period | 10/06/07 → 14/06/07 |
Keywords
- EWI-10850
- TST-Life like
- Biomimetic
- IR-64275
- flow sensor arrays
- capacitive
- METIS-241828
- Electrostatic spring softening