In this work, we present a model for our biomimetic, artificial hair sensors, to analyze the sensitivity dependence on their structural and geometrical parameters. Based on this model, feasible design improvements to achieve an increased sensitivity are discussed and a figure of merit to evaluate sensor performance is defined. Also, we discuss the results of a novel approach to implement adaptive sensor arrays through DC-biasing based on the electrostatic spring-softening effect. Experimental results show a clear theoretical accordance and tunability of system’s resonance frequency, providing opportunities for frequency focusing and selective sensitivity.
|Publisher||Technology Foundation, STW|
|Workshop||10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007|
|Period||29/11/07 → 30/11/07|
- TST-Life like
- Artificial Hair Sensors