Adaptive mirrors - upcoming powerful technologies for wavefront correction

Thilo Pollak, Reimar Finken, Kerstin Hild, Benjamin Wylie- Van Eerd, Dirk Jurgens, Diana Spengler

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 28 Jun 2017
Event	18th ASML Technology Conference 2017 - Veldhoven, Netherlands Duration: 28 Apr 2017 → 28 Apr 2017 Conference number: 18

Conference	18th ASML Technology Conference 2017
Country/Territory	Netherlands
City	Veldhoven
Period	28/04/17 → 28/04/17

Cite this

@conference{2b4b4a34c7344b7a9c477d13cda0182e,

title = "Adaptive mirrors - upcoming powerful technologies for wavefront correction",

author = "Thilo Pollak and Reimar Finken and Kerstin Hild and \{Wylie- Van Eerd\}, Benjamin and Dirk Jurgens and Diana Spengler",

year = "2017",

month = jun,

day = "28",

language = "English",

note = "18th ASML Technology Conference 2017 ; Conference date: 28-04-2017 Through 28-04-2017",

}

TY - CONF

T1 - Adaptive mirrors - upcoming powerful technologies for wavefront correction

AU - Pollak, Thilo

AU - Finken, Reimar

AU - Hild, Kerstin

AU - Wylie- Van Eerd, Benjamin

AU - Jurgens, Dirk

AU - Spengler, Diana

N1 - Conference code: 18

PY - 2017/6/28

Y1 - 2017/6/28

M3 - Poster

T2 - 18th ASML Technology Conference 2017

Y2 - 28 April 2017 through 28 April 2017

ER -