Adaptive piezoelectric optics for XUV wavelengths

Muharrem Bayraktar, Philip Lucke (Contributor), Mohammadreza Nematollahi (Contributor), Andrey Yakshin (Contributor), Eric Louis (Contributor), A.J.H.M. Rijnders (Contributor), F. Bijkerk (Contributor)

Research output: Contribution to conferencePosterAcademic

Original languageEnglish
Publication statusPublished - 13 Jun 2019
Event2019 EUVL Workshop - Center for X-Ray Optics, Berkeley, United States
Duration: 10 Jun 201913 Jun 2019
https://euvlitho.com/

Conference

Conference2019 EUVL Workshop
CountryUnited States
CityBerkeley
Period10/06/1913/06/19
Internet address

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