Adaptive piezoelectric optics for XUV wavelengths

Muharrem Bayraktar, Philip Lucke (Contributor), Mohammadreza Nematollahi (Contributor), Andrey Yakshin (Contributor), Eric Louis (Contributor), A.J.H.M. Rijnders (Contributor), F. Bijkerk (Contributor)

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 13 Jun 2019
Event2019 EUVL Workshop - Center for X-Ray Optics, Berkeley, United States
Duration: 10 Jun 201913 Jun 2019
https://euvlitho.com/

Conference

Conference2019 EUVL Workshop
CountryUnited States
CityBerkeley
Period10/06/1913/06/19
Internet address

Cite this

Bayraktar, M., Lucke, P., Nematollahi, M., Yakshin, A., Louis, E., Rijnders, A. J. H. M., & Bijkerk, F. (2019). Adaptive piezoelectric optics for XUV wavelengths. Poster session presented at 2019 EUVL Workshop, Berkeley, United States.