Adaptive piezoelectric optics for XUV wavelengths

Research output: Contribution to conference › Poster › Academic

17 Downloads (Pure)

Original language	English
Publication status	Published - 13 Jun 2019
Event	2019 EUVL Workshop - Center for X-Ray Optics, Berkeley, United States Duration: 10 Jun 2019 → 13 Jun 2019 https://euvlitho.com/

Access to Document

@conference{d89f2fea4a3b4565a571eb5ba0129dcf,

title = "Adaptive piezoelectric optics for XUV wavelengths",

author = "Muharrem Bayraktar and Philip Lucke and Mohammadreza Nematollahi and Andrey Yakshin and Eric Louis and A.J.H.M. Rijnders and F. Bijkerk",

year = "2019",

month = jun,

day = "13",

language = "English",

note = "2019 EUVL Workshop ; Conference date: 10-06-2019 Through 13-06-2019",

url = "https://euvlitho.com/",

}