Adding functionality to microchips by wafer post-processing

Jurriaan Schmitz

doi:10.1016/j.nima.2007.01.142

Adding functionality to microchips by wafer post-processing

Jurriaan Schmitz

Research output: Contribution to journal › Article › Academic › peer-review

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121 Downloads (Pure)

Abstract

The traditional microchip processes, stores and communicates electrical information. Here we review an emerging class of microchips that have additional functionality through extra integrated components in the chip. In the final manufacturing stage, layers are added on top of the chip, with a specific property such as sensitivity to ionizing radiation. This paper reviews the technology underlying these monolithic microsystems, including the incorporation of new materials, the unconventional application of photoresist layers, and low-temperature technology for suspended membranes. The manufacturing of exemplary microsystems, such as the active pixel sensor and liquid-crystalon-silicon, is detailed. A new class of fully integrated radiation imaging systems is now technologically within reach.

Original language	English
Article number	10.1016/j.nima.2007.01.142
Pages (from-to)	142-149
Number of pages	10
Journal	Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment
Volume	576
Issue number	2/1
DOIs	https://doi.org/10.1016/j.nima.2007.01.142
Publication status	Published - 16 Jun 2007

Keywords

METIS-242081
EWI-9538
IR-63977
SC-ICF: Integrated Circuit Fabrication

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.nima.2007.01.142

wafer post processingSubmitted version, 523 KBLicence: Unspecified

Cite this

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ER -

Adding functionality to microchips by wafer post-processing

Abstract

Keywords

UN SDGs

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