Adhesion and frinction in MEMS

Niels Roelof Tas, A.H. Vogelzang, Michael Curt Elwenspoek, R. Legtenberg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings Micro/nana tribology and it's applications
Place of Publication	Villas de Sesimbra, Portugal
Pages	-
Publication status	Published - 26 Feb 1997
Event	Proceedings Micro/nana tribology and it's applications - Duration: 1 Jan 1997 → 1 Jan 1997

Other	Proceedings Micro/nana tribology and it's applications
Period	1/01/97 → 1/01/97

Keywords

@inproceedings{ab1db33715934027878e9926d75e5546,

title = "Adhesion and frinction in MEMS",

keywords = "IR-33420, METIS-145700",

author = "Tas, {Niels Roelof} and A.H. Vogelzang and Elwenspoek, {Michael Curt} and R. Legtenberg",

year = "1997",

month = feb,

day = "26",

language = "English",

pages = "--",

booktitle = "Proceedings Micro/nana tribology and it's applications",

note = "Proceedings Micro/nana tribology and it's applications ; Conference date: 01-01-1997 Through 01-01-1997",

}

TY - GEN

T1 - Adhesion and frinction in MEMS

AU - Tas, Niels Roelof

AU - Vogelzang, A.H.

AU - Elwenspoek, Michael Curt

AU - Legtenberg, R.

PY - 1997/2/26

Y1 - 1997/2/26

KW - IR-33420

KW - METIS-145700

M3 - Conference contribution

SP - -

BT - Proceedings Micro/nana tribology and it's applications

CY - Villas de Sesimbra, Portugal

T2 - Proceedings Micro/nana tribology and it's applications

Y2 - 1 January 1997 through 1 January 1997

ER -