Adhesion and frinction in MEMS

Niels Roelof Tas, A.H. Vogelzang, Michael Curt Elwenspoek, R. Legtenberg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationProceedings Micro/nana tribology and it's applications
    Place of PublicationVillas de Sesimbra, Portugal
    Pages-
    Publication statusPublished - 26 Feb 1997
    EventProceedings Micro/nana tribology and it's applications -
    Duration: 1 Jan 19971 Jan 1997

    Other

    OtherProceedings Micro/nana tribology and it's applications
    Period1/01/971/01/97

    Keywords

    • IR-33420
    • METIS-145700

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