Advanced micro machining schemes for scanning probe tips

Rolf Vermeer

Research output: Thesis › PhD Thesis - Research UT, graduation UT

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Gardeniers, J.G.E., Supervisor Tas, Niels R., Co-Supervisor
Award date	26 Oct 2016
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	978-90-365-4212-8
DOIs	https://doi.org/10.3990/1.9789036542128
Publication status	Published - 26 Oct 2016

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

@phdthesis{a059087d680145ac92db4cea62d91a45,

title = "Advanced micro machining schemes for scanning probe tips",

author = "Rolf Vermeer",

note = "50% EWI, 50% TNW ",

year = "2016",

month = oct,

day = "26",

doi = "10.3990/1.9789036542128",

language = "English",

isbn = "978-90-365-4212-8",

publisher = "University of Twente",

address = "Netherlands",

type = "PhD Thesis - Research UT, graduation UT",

school = "University of Twente",

}