Piezoelectric materials produce electric charges on their surfaces as a consequence of applying mechanical stress or vice versa. They are used in the fabrication of a growing range of devices such as transducers (such as ultrasonic acoustic wave), actuators (microfludic pump), pressure sensor devices (gyroscopes), mass sensor devices (biological detection, SAW), and increasingly as a way of producing energy (energy harvester). In this paper, piezoelectric thin films based on lead-compound (PZT, PMN-PT), lead-free materials (BTO, BFO, AlN) and their fabrication techniques (PLD, sputtering and sol-gel) will be presented. The fabrication techniques for the integration of these films for microactuator and microsensor applications, as well as their characterizations, have been also investigated.
|Publication status||Published - 13 Dec 2012|
|Event||International Conference on Advanced Materials and Nanotechnology, ICAMN 2012 - Hanoi, Viet Nam|
Duration: 13 Dec 2012 → 14 Dec 2012
|Conference||International Conference on Advanced Materials and Nanotechnology, ICAMN 2012|
|Period||13/12/12 → 14/12/12|