Advanced piezoelectric thin-film materials for actuator and sensor applications

Minh D. Nguyen, Matthijn Dekkers, Xin Wan, An T. Tran, P.M. Sarro, Hung N. Vu, Guus Rijnders

Research output: Contribution to conferencePosterOther research output

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Abstract

Piezoelectric materials produce electric charges on their surfaces as a consequence of applying mechanical stress or vice versa. They are used in the fabrication of a growing range of devices such as transducers (such as ultrasonic acoustic wave), actuators (microfludic pump), pressure sensor devices (gyroscopes), mass sensor devices (biological detection, SAW), and increasingly as a way of producing energy (energy harvester). In this paper, piezoelectric thin films based on lead-compound (PZT, PMN-PT), lead-free materials (BTO, BFO, AlN) and their fabrication techniques (PLD, sputtering and sol-gel) will be presented. The fabrication techniques for the integration of these films for microactuator and microsensor applications, as well as their characterizations, have been also investigated.
Original languageEnglish
Publication statusPublished - 13 Dec 2012
EventInternational Conference on Advanced Materials and Nanotechnology, ICAMN 2012 - Hanoi, Viet Nam
Duration: 13 Dec 201214 Dec 2012
http://itims.edu.vn/conf/ICAMN2012/index.html

Conference

ConferenceInternational Conference on Advanced Materials and Nanotechnology, ICAMN 2012
Abbreviated titleICAMN
CountryViet Nam
CityHanoi
Period13/12/1214/12/12
Internet address

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actuators
fabrication
sensors
thin films
lead compounds
gyroscopes
pressure sensors
electric charge
transducers
ultrasonics
sputtering
gels
pumps
acoustics
energy

Keywords

  • METIS-292062

Cite this

Nguyen, M. D., Dekkers, M., Wan, X., Tran, A. T., Sarro, P. M., Vu, H. N., & Rijnders, G. (2012). Advanced piezoelectric thin-film materials for actuator and sensor applications. Poster session presented at International Conference on Advanced Materials and Nanotechnology, ICAMN 2012, Hanoi, Viet Nam.
Nguyen, Minh D. ; Dekkers, Matthijn ; Wan, Xin ; Tran, An T. ; Sarro, P.M. ; Vu, Hung N. ; Rijnders, Guus. / Advanced piezoelectric thin-film materials for actuator and sensor applications. Poster session presented at International Conference on Advanced Materials and Nanotechnology, ICAMN 2012, Hanoi, Viet Nam.
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abstract = "Piezoelectric materials produce electric charges on their surfaces as a consequence of applying mechanical stress or vice versa. They are used in the fabrication of a growing range of devices such as transducers (such as ultrasonic acoustic wave), actuators (microfludic pump), pressure sensor devices (gyroscopes), mass sensor devices (biological detection, SAW), and increasingly as a way of producing energy (energy harvester). In this paper, piezoelectric thin films based on lead-compound (PZT, PMN-PT), lead-free materials (BTO, BFO, AlN) and their fabrication techniques (PLD, sputtering and sol-gel) will be presented. The fabrication techniques for the integration of these films for microactuator and microsensor applications, as well as their characterizations, have been also investigated.",
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Nguyen, MD, Dekkers, M, Wan, X, Tran, AT, Sarro, PM, Vu, HN & Rijnders, G 2012, 'Advanced piezoelectric thin-film materials for actuator and sensor applications' International Conference on Advanced Materials and Nanotechnology, ICAMN 2012, Hanoi, Viet Nam, 13/12/12 - 14/12/12, .

Advanced piezoelectric thin-film materials for actuator and sensor applications. / Nguyen, Minh D.; Dekkers, Matthijn; Wan, Xin; Tran, An T.; Sarro, P.M.; Vu, Hung N.; Rijnders, Guus.

2012. Poster session presented at International Conference on Advanced Materials and Nanotechnology, ICAMN 2012, Hanoi, Viet Nam.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Advanced piezoelectric thin-film materials for actuator and sensor applications

AU - Nguyen, Minh D.

AU - Dekkers, Matthijn

AU - Wan, Xin

AU - Tran, An T.

AU - Sarro, P.M.

AU - Vu, Hung N.

AU - Rijnders, Guus

PY - 2012/12/13

Y1 - 2012/12/13

N2 - Piezoelectric materials produce electric charges on their surfaces as a consequence of applying mechanical stress or vice versa. They are used in the fabrication of a growing range of devices such as transducers (such as ultrasonic acoustic wave), actuators (microfludic pump), pressure sensor devices (gyroscopes), mass sensor devices (biological detection, SAW), and increasingly as a way of producing energy (energy harvester). In this paper, piezoelectric thin films based on lead-compound (PZT, PMN-PT), lead-free materials (BTO, BFO, AlN) and their fabrication techniques (PLD, sputtering and sol-gel) will be presented. The fabrication techniques for the integration of these films for microactuator and microsensor applications, as well as their characterizations, have been also investigated.

AB - Piezoelectric materials produce electric charges on their surfaces as a consequence of applying mechanical stress or vice versa. They are used in the fabrication of a growing range of devices such as transducers (such as ultrasonic acoustic wave), actuators (microfludic pump), pressure sensor devices (gyroscopes), mass sensor devices (biological detection, SAW), and increasingly as a way of producing energy (energy harvester). In this paper, piezoelectric thin films based on lead-compound (PZT, PMN-PT), lead-free materials (BTO, BFO, AlN) and their fabrication techniques (PLD, sputtering and sol-gel) will be presented. The fabrication techniques for the integration of these films for microactuator and microsensor applications, as well as their characterizations, have been also investigated.

KW - METIS-292062

M3 - Poster

ER -

Nguyen MD, Dekkers M, Wan X, Tran AT, Sarro PM, Vu HN et al. Advanced piezoelectric thin-film materials for actuator and sensor applications. 2012. Poster session presented at International Conference on Advanced Materials and Nanotechnology, ICAMN 2012, Hanoi, Viet Nam.