Advanced sacrificial poly-Si technology for fluidic systems

J.W. Berenschot; N.R. Tas; T.S.J. Lammerink; M. Elwenspoek; A. van den Berg

doi:10.1088/0960-1317/12/5/317

Advanced sacrificial poly-Si technology for fluidic systems

J.W. Berenschot, N.R. Tas, T.S.J. Lammerink, M. Elwenspoek, A. van den Berg

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Abstract

Sacrificial poly-Si etching can be used to create thin cavities and channels. By combining it with anisotropic KOH etching of a mono-Si substrate, important components for fluidic systems, such as V-grooved channels, thin sandwiched channels, channel crossings and membrane filters and injectors, have been fabricated in a single etch step.

Original language	English
Pages (from-to)	621-624
Number of pages	4
Journal	Journal of micromechanics and microengineering
Volume	12
Issue number	5
DOIs	https://doi.org/10.1088/0960-1317/12/5/317
Publication status	Published - Sept 2002

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title = "Advanced sacrificial poly-Si technology for fluidic systems",

abstract = "Sacrificial poly-Si etching can be used to create thin cavities and channels. By combining it with anisotropic KOH etching of a mono-Si substrate, important components for fluidic systems, such as V-grooved channels, thin sandwiched channels, channel crossings and membrane filters and injectors, have been fabricated in a single etch step.",

author = "J.W. Berenschot and N.R. Tas and T.S.J. Lammerink and M. Elwenspoek and {van den Berg}, A.",

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AU - Tas, N.R.

AU - Lammerink, T.S.J.

AU - Elwenspoek, M.

AU - van den Berg, A.

PY - 2002/9

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AB - Sacrificial poly-Si etching can be used to create thin cavities and channels. By combining it with anisotropic KOH etching of a mono-Si substrate, important components for fluidic systems, such as V-grooved channels, thin sandwiched channels, channel crossings and membrane filters and injectors, have been fabricated in a single etch step.

U2 - 10.1088/0960-1317/12/5/317

DO - 10.1088/0960-1317/12/5/317

M3 - Article

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JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

IS - 5

ER -

Advanced sacrificial poly-Si technology for fluidic systems

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