Abstract
In this paper we present the latest developments in the design, fabrication and application of single and arrays of biomimetic hair flow-sensors towards high-resolution air-flow imaging. Redesigning the electrode system of the hair sensor (using SOI wafer technology) has led to improve the detection limit down to 1 mm/s air-flow amplitude using 3 kHz measurement bandwidth. SOI technology facilitates the fabrication of wafer-scale arrays, which can be interrogated individually using a smart array interfacing scheme e.g Frequency Division Multiplexing (FDM). The combination of high-sensitive hair sensors and FDM opens possibilities for high spatial-resolution air-flow measurements. A chip-scale single hairs array is used to demonstrate flow-pattern measurements by reconstructing the field of a dipole projected at its position. The separation distance between array elements is determined using the reconstructed dipole field.
| Original language | Undefined |
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| Title of host publication | Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011 |
| Place of Publication | Norway |
| Publisher | Vestfold University College |
| Pages | - |
| Number of pages | 4 |
| ISBN (Print) | 978-82-7860-224-9 |
| Publication status | Published - Jun 2011 |
| Event | 22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway Duration: 19 Jun 2011 → 22 Jun 2011 Conference number: 22 |
Publication series
| Name | |
|---|---|
| Publisher | Vestfold University College, Department of Micro and Nano Systems Technology |
Conference
| Conference | 22nd Micromechanics and Microsystems Europe Workshop, MME 2011 |
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| Abbreviated title | MME |
| Country/Territory | Norway |
| City | Tønsberg |
| Period | 19/06/11 → 22/06/11 |
Keywords
- METIS-277406
- IR-77683
- FDM
- EWI-17872
- spatio-temporal flow pattern
- TST-Life like
- Biomimetic hair