Advancements in Biomimetic Hair Flow-Sensor Arrays

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    In this paper we present the latest developments in the design, fabrication and application of single and arrays of biomimetic hair flow-sensors towards high-resolution air-flow imaging. Redesigning the electrode system of the hair sensor (using SOI wafer technology) has led to improve the detection limit down to 1 mm/s air-flow amplitude using 3 kHz measurement bandwidth. SOI technology facilitates the fabrication of wafer-scale arrays, which can be interrogated individually using a smart array interfacing scheme e.g Frequency Division Multiplexing (FDM). The combination of high-sensitive hair sensors and FDM opens possibilities for high spatial-resolution air-flow measurements. A chip-scale single hairs array is used to demonstrate flow-pattern measurements by reconstructing the field of a dipole projected at its position. The separation distance between array elements is determined using the reconstructed dipole field.
    Original languageUndefined
    Title of host publicationProceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011
    Place of PublicationNorway
    PublisherVestfold University College
    Number of pages4
    ISBN (Print)978-82-7860-224-9
    Publication statusPublished - Jun 2011
    Event22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway
    Duration: 19 Jun 201122 Jun 2011
    Conference number: 22

    Publication series

    PublisherVestfold University College, Department of Micro and Nano Systems Technology


    Conference22nd Micromechanics and Microsystems Europe Workshop, MME 2011
    Abbreviated titleMME


    • METIS-277406
    • IR-77683
    • FDM
    • EWI-17872
    • spatio-temporal flow pattern
    • TST-Life like
    • Biomimetic hair

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