Advancements in Biomimetic Hair Flow-Sensor Arrays

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    Abstract

    In this paper we present the latest developments in the design, fabrication and application of single and arrays of biomimetic hair flow-sensors towards high-resolution air-flow imaging. Redesigning the electrode system of the hair sensor (using SOI wafer technology) has led to improve the detection limit down to 1 mm/s air-flow amplitude using 3 kHz measurement bandwidth. SOI technology facilitates the fabrication of wafer-scale arrays, which can be interrogated individually using a smart array interfacing scheme e.g Frequency Division Multiplexing (FDM). The combination of high-sensitive hair sensors and FDM opens possibilities for high spatial-resolution air-flow measurements. A chip-scale single hairs array is used to demonstrate flow-pattern measurements by reconstructing the field of a dipole projected at its position. The separation distance between array elements is determined using the reconstructed dipole field.
    Original languageUndefined
    Title of host publicationProceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011
    Place of PublicationNorway
    PublisherVestfold University College, Norway
    Pages-
    Number of pages4
    ISBN (Print)978-82-7860-224-9
    Publication statusPublished - Jun 2011
    Event22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway
    Duration: 19 Jun 201122 Jun 2011
    Conference number: 22

    Publication series

    Name
    PublisherVestfold University College, Department of Micro and Nano Systems Technology

    Conference

    Conference22nd Micromechanics and Microsystems Europe Workshop, MME 2011
    Abbreviated titleMME
    CountryNorway
    CityTønsberg
    Period19/06/1122/06/11

    Keywords

    • METIS-277406
    • IR-77683
    • FDM
    • EWI-17872
    • spatio-temporal flow pattern
    • TST-Life like
    • Biomimetic hair

    Cite this

    Dagamseh, A. M. K., Lammerink, T. S. J., Wiegerink, R. J., & Krijnen, G. J. M. (2011). Advancements in Biomimetic Hair Flow-Sensor Arrays. In Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011 (pp. -). Norway: Vestfold University College, Norway.
    Dagamseh, A.M.K. ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. ; Krijnen, Gijsbertus J.M. / Advancements in Biomimetic Hair Flow-Sensor Arrays. Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011. Norway : Vestfold University College, Norway, 2011. pp. -
    @inproceedings{322a44003ac14e629138e0ca745c4e4f,
    title = "Advancements in Biomimetic Hair Flow-Sensor Arrays",
    abstract = "In this paper we present the latest developments in the design, fabrication and application of single and arrays of biomimetic hair flow-sensors towards high-resolution air-flow imaging. Redesigning the electrode system of the hair sensor (using SOI wafer technology) has led to improve the detection limit down to 1 mm/s air-flow amplitude using 3 kHz measurement bandwidth. SOI technology facilitates the fabrication of wafer-scale arrays, which can be interrogated individually using a smart array interfacing scheme e.g Frequency Division Multiplexing (FDM). The combination of high-sensitive hair sensors and FDM opens possibilities for high spatial-resolution air-flow measurements. A chip-scale single hairs array is used to demonstrate flow-pattern measurements by reconstructing the field of a dipole projected at its position. The separation distance between array elements is determined using the reconstructed dipole field.",
    keywords = "METIS-277406, IR-77683, FDM, EWI-17872, spatio-temporal flow pattern, TST-Life like, Biomimetic hair",
    author = "A.M.K. Dagamseh and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.}",
    note = "eemcs-eprint-17872",
    year = "2011",
    month = "6",
    language = "Undefined",
    isbn = "978-82-7860-224-9",
    publisher = "Vestfold University College, Norway",
    pages = "--",
    booktitle = "Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011",

    }

    Dagamseh, AMK, Lammerink, TSJ, Wiegerink, RJ & Krijnen, GJM 2011, Advancements in Biomimetic Hair Flow-Sensor Arrays. in Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011. Vestfold University College, Norway, Norway, pp. -, 22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tønsberg, Norway, 19/06/11.

    Advancements in Biomimetic Hair Flow-Sensor Arrays. / Dagamseh, A.M.K.; Lammerink, Theodorus S.J.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.

    Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011. Norway : Vestfold University College, Norway, 2011. p. -.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    TY - GEN

    T1 - Advancements in Biomimetic Hair Flow-Sensor Arrays

    AU - Dagamseh, A.M.K.

    AU - Lammerink, Theodorus S.J.

    AU - Wiegerink, Remco J.

    AU - Krijnen, Gijsbertus J.M.

    N1 - eemcs-eprint-17872

    PY - 2011/6

    Y1 - 2011/6

    N2 - In this paper we present the latest developments in the design, fabrication and application of single and arrays of biomimetic hair flow-sensors towards high-resolution air-flow imaging. Redesigning the electrode system of the hair sensor (using SOI wafer technology) has led to improve the detection limit down to 1 mm/s air-flow amplitude using 3 kHz measurement bandwidth. SOI technology facilitates the fabrication of wafer-scale arrays, which can be interrogated individually using a smart array interfacing scheme e.g Frequency Division Multiplexing (FDM). The combination of high-sensitive hair sensors and FDM opens possibilities for high spatial-resolution air-flow measurements. A chip-scale single hairs array is used to demonstrate flow-pattern measurements by reconstructing the field of a dipole projected at its position. The separation distance between array elements is determined using the reconstructed dipole field.

    AB - In this paper we present the latest developments in the design, fabrication and application of single and arrays of biomimetic hair flow-sensors towards high-resolution air-flow imaging. Redesigning the electrode system of the hair sensor (using SOI wafer technology) has led to improve the detection limit down to 1 mm/s air-flow amplitude using 3 kHz measurement bandwidth. SOI technology facilitates the fabrication of wafer-scale arrays, which can be interrogated individually using a smart array interfacing scheme e.g Frequency Division Multiplexing (FDM). The combination of high-sensitive hair sensors and FDM opens possibilities for high spatial-resolution air-flow measurements. A chip-scale single hairs array is used to demonstrate flow-pattern measurements by reconstructing the field of a dipole projected at its position. The separation distance between array elements is determined using the reconstructed dipole field.

    KW - METIS-277406

    KW - IR-77683

    KW - FDM

    KW - EWI-17872

    KW - spatio-temporal flow pattern

    KW - TST-Life like

    KW - Biomimetic hair

    M3 - Conference contribution

    SN - 978-82-7860-224-9

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    BT - Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011

    PB - Vestfold University College, Norway

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    Dagamseh AMK, Lammerink TSJ, Wiegerink RJ, Krijnen GJM. Advancements in Biomimetic Hair Flow-Sensor Arrays. In Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011. Norway: Vestfold University College, Norway. 2011. p. -