Advancements in Biomimetic Hair Flow-Sensor Arrays

A.M.K. Dagamseh; Theodorus S.J. Lammerink; Remco J. Wiegerink; Gijsbertus J.M. Krijnen

Advancements in Biomimetic Hair Flow-Sensor Arrays

A.M.K. Dagamseh
, Theodorus S.J. Lammerink
, Remco J. Wiegerink
, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

172 Downloads (Pure)

Abstract

In this paper we present the latest developments in the design, fabrication and application of single and arrays of biomimetic hair flow-sensors towards high-resolution air-flow imaging. Redesigning the electrode system of the hair sensor (using SOI wafer technology) has led to improve the detection limit down to 1 mm/s air-flow amplitude using 3 kHz measurement bandwidth. SOI technology facilitates the fabrication of wafer-scale arrays, which can be interrogated individually using a smart array interfacing scheme e.g Frequency Division Multiplexing (FDM). The combination of high-sensitive hair sensors and FDM opens possibilities for high spatial-resolution air-flow measurements. A chip-scale single hairs array is used to demonstrate flow-pattern measurements by reconstructing the field of a dipole projected at its position. The separation distance between array elements is determined using the reconstructed dipole field.

Original language	Undefined
Title of host publication	Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011
Place of Publication	Norway
Publisher	Vestfold University College
Pages	-
Number of pages	4
ISBN (Print)	978-82-7860-224-9
Publication status	Published - Jun 2011
Event	22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway Duration: 19 Jun 2011 → 22 Jun 2011 Conference number: 22

Publication series

Name
Publisher	Vestfold University College, Department of Micro and Nano Systems Technology

Conference

Conference	22nd Micromechanics and Microsystems Europe Workshop, MME 2011
Abbreviated title	MME
Country/Territory	Norway
City	Tønsberg
Period	19/06/11 → 22/06/11

Keywords

METIS-277406
IR-77683
FDM
EWI-17872
spatio-temporal flow pattern
TST-Life like
Biomimetic hair

Access to Document

http://www.mme2011.org/MME2011_Proceedings.pdf

Cite this

@inproceedings{322a44003ac14e629138e0ca745c4e4f,

title = "Advancements in Biomimetic Hair Flow-Sensor Arrays",

abstract = "In this paper we present the latest developments in the design, fabrication and application of single and arrays of biomimetic hair flow-sensors towards high-resolution air-flow imaging. Redesigning the electrode system of the hair sensor (using SOI wafer technology) has led to improve the detection limit down to 1 mm/s air-flow amplitude using 3 kHz measurement bandwidth. SOI technology facilitates the fabrication of wafer-scale arrays, which can be interrogated individually using a smart array interfacing scheme e.g Frequency Division Multiplexing (FDM). The combination of high-sensitive hair sensors and FDM opens possibilities for high spatial-resolution air-flow measurements. A chip-scale single hairs array is used to demonstrate flow-pattern measurements by reconstructing the field of a dipole projected at its position. The separation distance between array elements is determined using the reconstructed dipole field.",

keywords = "METIS-277406, IR-77683, FDM, EWI-17872, spatio-temporal flow pattern, TST-Life like, Biomimetic hair",

author = "A.M.K. Dagamseh and Lammerink, \{Theodorus S.J.\} and Wiegerink, \{Remco J.\} and Krijnen, \{Gijsbertus J.M.\}",

note = "eemcs-eprint-17872 ; 22nd Micromechanics and Microsystems Europe Workshop, MME 2011 ; Conference date: 19-06-2011 Through 22-06-2011",

year = "2011",

month = jun,

language = "Undefined",

isbn = "978-82-7860-224-9",

publisher = "Vestfold University College",

pages = "--",

booktitle = "Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011",

}

Dagamseh, AMK, Lammerink, TSJ, Wiegerink, RJ & Krijnen, GJM 2011, Advancements in Biomimetic Hair Flow-Sensor Arrays. in Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011. Vestfold University College, Norway, pp. -, 22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tønsberg, Norway, 19/06/11. <http://www.mme2011.org/MME2011_Proceedings.pdf>

Advancements in Biomimetic Hair Flow-Sensor Arrays. / Dagamseh, A.M.K.; Lammerink, Theodorus S.J.; Wiegerink, Remco J. et al.
Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011. Norway: Vestfold University College, 2011. p. -.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Advancements in Biomimetic Hair Flow-Sensor Arrays

AU - Dagamseh, A.M.K.

AU - Lammerink, Theodorus S.J.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 22

PY - 2011/6

Y1 - 2011/6

N2 - In this paper we present the latest developments in the design, fabrication and application of single and arrays of biomimetic hair flow-sensors towards high-resolution air-flow imaging. Redesigning the electrode system of the hair sensor (using SOI wafer technology) has led to improve the detection limit down to 1 mm/s air-flow amplitude using 3 kHz measurement bandwidth. SOI technology facilitates the fabrication of wafer-scale arrays, which can be interrogated individually using a smart array interfacing scheme e.g Frequency Division Multiplexing (FDM). The combination of high-sensitive hair sensors and FDM opens possibilities for high spatial-resolution air-flow measurements. A chip-scale single hairs array is used to demonstrate flow-pattern measurements by reconstructing the field of a dipole projected at its position. The separation distance between array elements is determined using the reconstructed dipole field.

AB - In this paper we present the latest developments in the design, fabrication and application of single and arrays of biomimetic hair flow-sensors towards high-resolution air-flow imaging. Redesigning the electrode system of the hair sensor (using SOI wafer technology) has led to improve the detection limit down to 1 mm/s air-flow amplitude using 3 kHz measurement bandwidth. SOI technology facilitates the fabrication of wafer-scale arrays, which can be interrogated individually using a smart array interfacing scheme e.g Frequency Division Multiplexing (FDM). The combination of high-sensitive hair sensors and FDM opens possibilities for high spatial-resolution air-flow measurements. A chip-scale single hairs array is used to demonstrate flow-pattern measurements by reconstructing the field of a dipole projected at its position. The separation distance between array elements is determined using the reconstructed dipole field.

KW - METIS-277406

KW - IR-77683

KW - FDM

KW - EWI-17872

KW - spatio-temporal flow pattern

KW - TST-Life like

KW - Biomimetic hair

M3 - Conference contribution

SN - 978-82-7860-224-9

SP - -

BT - Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011

PB - Vestfold University College

CY - Norway

T2 - 22nd Micromechanics and Microsystems Europe Workshop, MME 2011

Y2 - 19 June 2011 through 22 June 2011

ER -