Advancements in technology and design of biomimetic flow-sensor arrays

C.M. Bruinink; R.K. Jaganatharaja; Meint J. de Boer; Johan W. Berenschot; M.L. Kolster; Theodorus S.J. Lammerink; Remco J. Wiegerink; Gijsbertus J.M. Krijnen

doi:10.1109/MEMSYS.2009.4805341

Advancements in technology and design of biomimetic flow-sensor arrays

C.M. Bruinink, R.K. Jaganatharaja, Meint J. de Boer, Johan W. Berenschot, M.L. Kolster, Theodorus S.J. Lammerink, Remco J. Wiegerink, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

53 Citations (Scopus)

197 Downloads (Pure)

Abstract

This paper reports on recent developments to increase the performance of biomimetic flow-sensor arrays by means of several technological advancements in the fabrication procedures and corresponding sensor design optimizations. Advancements include fabrication procedures with higher process latitude and geometrical modifications of several parts of the flow sensor. The conclusive measurements in this paper support our sensormodel predictions for a 100-fold increase in acoustic sensitivity (down to oscillating flow amplitudes in the order of 1 mm/s) translating to substantially higher capacitive outputs in comparison to our first-generation biomimetic flow-sensor arrays.

Original language	English
Title of host publication	22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009)
Place of Publication	Piscataway
Publisher	IEEE
Pages	152-155
Number of pages	152
ISBN (Print)	978-1-4244-2978-3
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805341
Publication status	Published - 24 Jan 2009
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 25 Jan 2009 → 29 Jan 2009 Conference number: 22

Publication series

Name
Publisher	IEEE Computer Society Press
Number	CFP09MEM-U
ISSN (Print)	1084-6999

Conference

Conference	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
Abbreviated title	MEMS
Country/Territory	Italy
City	Sorrento
Period	25/01/09 → 29/01/09

Keywords

EWI-15020
METIS-263728
IR-65372
TST-Life like

Access to Document

10.1109/MEMSYS.2009.4805341

Cite this

Bruinink, C. M., Jaganatharaja, R. K., de Boer, M. J., Berenschot, J. W., Kolster, M. L., Lammerink, T. S. J., Wiegerink, R. J., & Krijnen, G. J. M. (2009). Advancements in technology and design of biomimetic flow-sensor arrays. In 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009) (pp. 152-155). IEEE. https://doi.org/10.1109/MEMSYS.2009.4805341

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title = "Advancements in technology and design of biomimetic flow-sensor arrays",

abstract = "This paper reports on recent developments to increase the performance of biomimetic flow-sensor arrays by means of several technological advancements in the fabrication procedures and corresponding sensor design optimizations. Advancements include fabrication procedures with higher process latitude and geometrical modifications of several parts of the flow sensor. The conclusive measurements in this paper support our sensormodel predictions for a 100-fold increase in acoustic sensitivity (down to oscillating flow amplitudes in the order of 1 mm/s) translating to substantially higher capacitive outputs in comparison to our first-generation biomimetic flow-sensor arrays.",

keywords = "EWI-15020, METIS-263728, IR-65372, TST-Life like",

author = "C.M. Bruinink and R.K. Jaganatharaja and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and M.L. Kolster and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.}",

note = "10.1109/MEMSYS.2009.4805341 ; 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, MEMS ; Conference date: 25-01-2009 Through 29-01-2009",

year = "2009",

month = jan,

day = "24",

doi = "10.1109/MEMSYS.2009.4805341",

language = "English",

isbn = "978-1-4244-2978-3",

publisher = "IEEE",

number = "CFP09MEM-U",

pages = "152--155",

booktitle = "22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009)",

address = "United States",

}

Bruinink, CM, Jaganatharaja, RK, de Boer, MJ, Berenschot, JW, Kolster, ML, Lammerink, TSJ, Wiegerink, RJ & Krijnen, GJM 2009, Advancements in technology and design of biomimetic flow-sensor arrays. in 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009). IEEE, Piscataway, pp. 152-155, 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, Sorrento, Italy, 25/01/09. https://doi.org/10.1109/MEMSYS.2009.4805341

Advancements in technology and design of biomimetic flow-sensor arrays. / Bruinink, C.M.; Jaganatharaja, R.K.; de Boer, Meint J. et al.
22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009). Piscataway: IEEE, 2009. p. 152-155.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - This paper reports on recent developments to increase the performance of biomimetic flow-sensor arrays by means of several technological advancements in the fabrication procedures and corresponding sensor design optimizations. Advancements include fabrication procedures with higher process latitude and geometrical modifications of several parts of the flow sensor. The conclusive measurements in this paper support our sensormodel predictions for a 100-fold increase in acoustic sensitivity (down to oscillating flow amplitudes in the order of 1 mm/s) translating to substantially higher capacitive outputs in comparison to our first-generation biomimetic flow-sensor arrays.

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KW - TST-Life like

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Advancements in technology and design of biomimetic flow-sensor arrays

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