This paper reports on recent developments to increase the performance of biomimetic flow-sensor arrays by means of several technological advancements in the fabrication procedures and corresponding sensor design optimizations. Advancements include fabrication procedures with higher process latitude and geometrical modifications of several parts of the flow sensor. The conclusive measurements in this paper support our sensormodel predictions for a 100-fold increase in acoustic sensitivity (down to oscillating flow amplitudes in the order of 1 mm/s) translating to substantially higher capacitive outputs in comparison to our first-generation biomimetic flow-sensor arrays.
|Publisher||IEEE Computer Society Press|
|Conference||22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009|
|Period||25/01/09 → 29/01/09|
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