Advancements in technology and design of biomimetic flow-sensor arrays

C.M. Bruinink, R.K. Jaganatharaja, Meint J. de Boer, Johan W. Berenschot, M.L. Kolster, Theodorus S.J. Lammerink, Remco J. Wiegerink, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    49 Citations (Scopus)
    106 Downloads (Pure)


    This paper reports on recent developments to increase the performance of biomimetic flow-sensor arrays by means of several technological advancements in the fabrication procedures and corresponding sensor design optimizations. Advancements include fabrication procedures with higher process latitude and geometrical modifications of several parts of the flow sensor. The conclusive measurements in this paper support our sensormodel predictions for a 100-fold increase in acoustic sensitivity (down to oscillating flow amplitudes in the order of 1 mm/s) translating to substantially higher capacitive outputs in comparison to our first-generation biomimetic flow-sensor arrays.
    Original languageUndefined
    Title of host publication22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009)
    Place of PublicationPiscataway
    PublisherIEEE Computer Society Press
    Number of pages152
    ISBN (Print)978-1-4244-2978-3
    Publication statusPublished - 24 Jan 2009
    Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
    Duration: 25 Jan 200929 Jan 2009
    Conference number: 22

    Publication series

    PublisherIEEE Computer Society Press
    ISSN (Print)1084-6999


    Conference22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
    Abbreviated titleMEMS


    • EWI-15020
    • METIS-263728
    • IR-65372
    • TST-Life like

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