Advancing X-ray standing wave data analysis

Igor A. Makhotkin, Sergey N. Yakunin (Contributor), C.P. Hendrikx (Contributor), Anirudhan Chandrasekaran (Contributor), Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), F. Bijkerk (Contributor)

Research output: Contribution to conferencePosterAcademic

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Abstract

The growing complexity of multilayer mirrors (MLMs) calls for the development of accurate and non-destructive characterization techniques suitable for routine characterization of as-deposited MLMs with sub-nm accuracy. The classical X-ray reflectivity technique shows high sensitivity to the smallest details of a multilayer structure, but the interpretation of the measured data remains complex and in some cases non-unique, even if advanced model independent data analysis algorithms are used[1]. To reconstruct the structure of a multilayer mirror reliably a combination of X-ray reflectivity and angular dependent X-ray fluorescence data is easy to use, especially because both data sets can be measured using the same laboratory X-ray setup. The angular dependent fluorescence signal adds the information about the mean positions of distributions of individual elements and the width of their distribution. This information presents natural regularization of electron density profile that filters number of unphysical solutions that can be obtained from GIXR only data analysis. We will present the reconstruction of multilayer structures from combined X-ray reflectivity and X-ray fluorescence measurements. The strategies for optimal measurements, the value of additional data and the challenges of data analysis will be discussed.
Original languageEnglish
Publication statusPublished - 7 Nov 2018
EventPhysics of X-Ray and Neutron Multilayer Structures, PXRNMS2018 - Sciences Sorbonne Université, Paris, France
Duration: 7 Nov 20189 Nov 2018
https://pxrnms2018.sciencesconf.org/resource/page/id/8

Workshop

WorkshopPhysics of X-Ray and Neutron Multilayer Structures, PXRNMS2018
Abbreviated titlePXRNMS2018
CountryFrance
CityParis
Period7/11/189/11/18
Internet address

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standing waves
x rays
mirrors
reflectance
fluorescence
laminates
electron density profiles
filters
sensitivity

Cite this

Makhotkin, I. A., Yakunin, S. N., Hendrikx, C. P., Chandrasekaran, A., van de Kruijs, R. W. E., & Bijkerk, F. (2018). Advancing X-ray standing wave data analysis. Poster session presented at Physics of X-Ray and Neutron Multilayer Structures, PXRNMS2018, Paris, France.
Makhotkin, Igor A. ; Yakunin, Sergey N. ; Hendrikx, C.P. ; Chandrasekaran, Anirudhan ; van de Kruijs, Robbert Wilhelmus Elisabeth ; Bijkerk, F. / Advancing X-ray standing wave data analysis. Poster session presented at Physics of X-Ray and Neutron Multilayer Structures, PXRNMS2018, Paris, France.
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author = "Makhotkin, {Igor A.} and Yakunin, {Sergey N.} and C.P. Hendrikx and Anirudhan Chandrasekaran and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and F. Bijkerk",
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Makhotkin, IA, Yakunin, SN, Hendrikx, CP, Chandrasekaran, A, van de Kruijs, RWE & Bijkerk, F 2018, 'Advancing X-ray standing wave data analysis' Physics of X-Ray and Neutron Multilayer Structures, PXRNMS2018, Paris, France, 7/11/18 - 9/11/18, .

Advancing X-ray standing wave data analysis. / Makhotkin, Igor A.; Yakunin, Sergey N. (Contributor); Hendrikx, C.P. (Contributor); Chandrasekaran, Anirudhan (Contributor); van de Kruijs, Robbert Wilhelmus Elisabeth (Contributor); Bijkerk, F. (Contributor).

2018. Poster session presented at Physics of X-Ray and Neutron Multilayer Structures, PXRNMS2018, Paris, France.

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - Advancing X-ray standing wave data analysis

AU - Makhotkin, Igor A.

A2 - Yakunin, Sergey N.

A2 - Hendrikx, C.P.

A2 - Chandrasekaran, Anirudhan

A2 - van de Kruijs, Robbert Wilhelmus Elisabeth

A2 - Bijkerk, F.

PY - 2018/11/7

Y1 - 2018/11/7

N2 - The growing complexity of multilayer mirrors (MLMs) calls for the development of accurate and non-destructive characterization techniques suitable for routine characterization of as-deposited MLMs with sub-nm accuracy. The classical X-ray reflectivity technique shows high sensitivity to the smallest details of a multilayer structure, but the interpretation of the measured data remains complex and in some cases non-unique, even if advanced model independent data analysis algorithms are used[1]. To reconstruct the structure of a multilayer mirror reliably a combination of X-ray reflectivity and angular dependent X-ray fluorescence data is easy to use, especially because both data sets can be measured using the same laboratory X-ray setup. The angular dependent fluorescence signal adds the information about the mean positions of distributions of individual elements and the width of their distribution. This information presents natural regularization of electron density profile that filters number of unphysical solutions that can be obtained from GIXR only data analysis. We will present the reconstruction of multilayer structures from combined X-ray reflectivity and X-ray fluorescence measurements. The strategies for optimal measurements, the value of additional data and the challenges of data analysis will be discussed.

AB - The growing complexity of multilayer mirrors (MLMs) calls for the development of accurate and non-destructive characterization techniques suitable for routine characterization of as-deposited MLMs with sub-nm accuracy. The classical X-ray reflectivity technique shows high sensitivity to the smallest details of a multilayer structure, but the interpretation of the measured data remains complex and in some cases non-unique, even if advanced model independent data analysis algorithms are used[1]. To reconstruct the structure of a multilayer mirror reliably a combination of X-ray reflectivity and angular dependent X-ray fluorescence data is easy to use, especially because both data sets can be measured using the same laboratory X-ray setup. The angular dependent fluorescence signal adds the information about the mean positions of distributions of individual elements and the width of their distribution. This information presents natural regularization of electron density profile that filters number of unphysical solutions that can be obtained from GIXR only data analysis. We will present the reconstruction of multilayer structures from combined X-ray reflectivity and X-ray fluorescence measurements. The strategies for optimal measurements, the value of additional data and the challenges of data analysis will be discussed.

M3 - Poster

ER -

Makhotkin IA, Yakunin SN, Hendrikx CP, Chandrasekaran A, van de Kruijs RWE, Bijkerk F. Advancing X-ray standing wave data analysis. 2018. Poster session presented at Physics of X-Ray and Neutron Multilayer Structures, PXRNMS2018, Paris, France.