AFM studies of surface morphologies of sputtered SrTiO3 films and annealed MgO substrates

Q. Meng, R. Moerman, A.H. Sonnenberg, G.J. Gerritsma

    Research output: Contribution to journalArticleAcademicpeer-review

    2 Citations (Scopus)

    Abstract

    Atomic force microscopy (AFM) is applied to study the surface morphologies and growth mechanisms of sputtered SrTiO3 films on single-crystal MgO(100) substrates. Meanwhile, surface morphologies of as-polished and post-annealed MgO(100) substrates are investigated as well. Effects of the miscut (or misorientation) of the substrate surface on morphologies and growth mechanisms are discussed. For comparison, a typical surface morphology and growth mechanism of the spiral island structure in sputtered PrBa2Cu3O7-δ films on MgO(100) substrates are presented.
    Original languageEnglish
    Pages (from-to)239-245
    Number of pages7
    JournalApplied physics A: Materials science and processing
    Volume68
    Issue number2
    DOIs
    Publication statusPublished - 1999

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