Atomic force microscopy (AFM) is applied to study the surface morphologies and growth mechanisms of sputtered SrTiO3 films on single-crystal MgO(100) substrates. Meanwhile, surface morphologies of as-polished and post-annealed MgO(100) substrates are investigated as well. Effects of the miscut (or misorientation) of the substrate surface on morphologies and growth mechanisms are discussed. For comparison, a typical surface morphology and growth mechanism of the spiral island structure in sputtered PrBa2Cu3O7-δ films on MgO(100) substrates are presented.
|Number of pages||7|
|Journal||Applied physics A: Materials science and processing|
|Publication status||Published - 1999|
Meng, Q., Moerman, R., Sonnenberg, A. H., & Gerritsma, G. J. (1999). AFM studies of surface morphologies of sputtered SrTiO3 films and annealed MgO substrates. Applied physics A: Materials science and processing, 68(2), 239-245. https://doi.org/10.1007/s003390050882