Abstract
Atomic force microscopy (AFM) is applied to study the surface morphologies and growth mechanisms of sputtered SrTiO3 films on single-crystal MgO(100) substrates. Meanwhile, surface morphologies of as-polished and post-annealed MgO(100) substrates are investigated as well. Effects of the miscut (or misorientation) of the substrate surface on morphologies and growth mechanisms are discussed. For comparison, a typical surface morphology and growth mechanism of the spiral island structure in sputtered PrBa2Cu3O7-δ films on MgO(100) substrates are presented.
| Original language | English |
|---|---|
| Pages (from-to) | 239-245 |
| Number of pages | 7 |
| Journal | Applied physics A: Materials science and processing |
| Volume | 68 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 1999 |
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Meng, Q., Moerman, R., Sonnenberg, A. H., & Gerritsma, G. J. (1999). AFM studies of surface morphologies of sputtered SrTiO3 films and annealed MgO substrates. Applied physics A: Materials science and processing, 68(2), 239-245. https://doi.org/10.1007/s003390050882