TY - JOUR
T1 - AFM studies of surface morphologies of sputtered SrTiO3 films and annealed MgO substrates
AU - Meng, Q.
AU - Moerman, R.
AU - Sonnenberg, A.H.
AU - Gerritsma, G.J.
PY - 1999
Y1 - 1999
N2 - Atomic force microscopy (AFM) is applied to study the surface morphologies and growth mechanisms of sputtered SrTiO3 films on single-crystal MgO(100) substrates. Meanwhile, surface morphologies of as-polished and post-annealed MgO(100) substrates are investigated as well. Effects of the miscut (or misorientation) of the substrate surface on morphologies and growth mechanisms are discussed. For comparison, a typical surface morphology and growth mechanism of the spiral island structure in sputtered PrBa2Cu3O7-δ films on MgO(100) substrates are presented.
AB - Atomic force microscopy (AFM) is applied to study the surface morphologies and growth mechanisms of sputtered SrTiO3 films on single-crystal MgO(100) substrates. Meanwhile, surface morphologies of as-polished and post-annealed MgO(100) substrates are investigated as well. Effects of the miscut (or misorientation) of the substrate surface on morphologies and growth mechanisms are discussed. For comparison, a typical surface morphology and growth mechanism of the spiral island structure in sputtered PrBa2Cu3O7-δ films on MgO(100) substrates are presented.
U2 - 10.1007/s003390050882
DO - 10.1007/s003390050882
M3 - Article
VL - 68
SP - 239
EP - 245
JO - Applied physics A: Materials science and processing
JF - Applied physics A: Materials science and processing
SN - 0947-8396
IS - 2
ER -