AFM studies of surface morphologies of sputtered SrTiO3 films and annealed MgO substrates

Q. Meng; R. Moerman; A.H. Sonnenberg; G.J. Gerritsma

doi:10.1007/s003390050882

AFM studies of surface morphologies of sputtered SrTiO₃ films and annealed MgO substrates

Q. Meng, R. Moerman, A.H. Sonnenberg, G.J. Gerritsma

Research output: Contribution to journal › Article › Academic › peer-review

2 Citations (Scopus)

Abstract

Atomic force microscopy (AFM) is applied to study the surface morphologies and growth mechanisms of sputtered SrTiO₃ films on single-crystal MgO(100) substrates. Meanwhile, surface morphologies of as-polished and post-annealed MgO(100) substrates are investigated as well. Effects of the miscut (or misorientation) of the substrate surface on morphologies and growth mechanisms are discussed. For comparison, a typical surface morphology and growth mechanism of the spiral island structure in sputtered PrBa₂Cu₃O_7-δ films on MgO(100) substrates are presented.

Original language	English
Pages (from-to)	239-245
Number of pages	7
Journal	Applied physics A: Materials science and processing
Volume	68
Issue number	2
DOIs	https://doi.org/10.1007/s003390050882
Publication status	Published - 1999

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abstract = "Atomic force microscopy (AFM) is applied to study the surface morphologies and growth mechanisms of sputtered SrTiO3 films on single-crystal MgO(100) substrates. Meanwhile, surface morphologies of as-polished and post-annealed MgO(100) substrates are investigated as well. Effects of the miscut (or misorientation) of the substrate surface on morphologies and growth mechanisms are discussed. For comparison, a typical surface morphology and growth mechanism of the spiral island structure in sputtered PrBa2Cu3O7-δ films on MgO(100) substrates are presented.",

author = "Q. Meng and R. Moerman and A.H. Sonnenberg and G.J. Gerritsma",

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AU - Meng, Q.

AU - Moerman, R.

AU - Sonnenberg, A.H.

AU - Gerritsma, G.J.

PY - 1999

Y1 - 1999

N2 - Atomic force microscopy (AFM) is applied to study the surface morphologies and growth mechanisms of sputtered SrTiO3 films on single-crystal MgO(100) substrates. Meanwhile, surface morphologies of as-polished and post-annealed MgO(100) substrates are investigated as well. Effects of the miscut (or misorientation) of the substrate surface on morphologies and growth mechanisms are discussed. For comparison, a typical surface morphology and growth mechanism of the spiral island structure in sputtered PrBa2Cu3O7-δ films on MgO(100) substrates are presented.

AB - Atomic force microscopy (AFM) is applied to study the surface morphologies and growth mechanisms of sputtered SrTiO3 films on single-crystal MgO(100) substrates. Meanwhile, surface morphologies of as-polished and post-annealed MgO(100) substrates are investigated as well. Effects of the miscut (or misorientation) of the substrate surface on morphologies and growth mechanisms are discussed. For comparison, a typical surface morphology and growth mechanism of the spiral island structure in sputtered PrBa2Cu3O7-δ films on MgO(100) substrates are presented.

U2 - 10.1007/s003390050882

DO - 10.1007/s003390050882

M3 - Article

VL - 68

SP - 239

EP - 245

JO - Applied physics A: Materials science and processing

JF - Applied physics A: Materials science and processing

SN - 0947-8396

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