Alignment issues in photonic crystal device fabrication

R.M. de Ridder, C.G. Bostan, Frank J. van Soest, V.J. Gadgil

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    Abstract

    An important requirement in the fabrication of photonic crystal structures is the correct relative alignment of structural elements. Accuracy should be in the order of some tens of nanometres. Some of the options for providing such accuracy are discussed. Examples are given of aligning defects with respect to a predefined 2D lattice, aligning access waveguides with respect to a small local photonic crystal structure, and the alignment of successive periodically structured layers in a 3D "woodpile" structure.
    Original languageUndefined
    Title of host publicationProceedings of 6th International Conference on Transparent Optical Networks, 2004
    PublisherIEEE
    Pages260-266
    Number of pages6
    ISBN (Print)0-7803-8343-5
    DOIs
    Publication statusPublished - 4 Jul 2004
    Event6th International Conference on Transparent Optical Networks, ICTON 2004 - Wroclaw, Poland
    Duration: 4 Jul 20048 Jul 2004
    Conference number: 6

    Publication series

    Name
    PublisherIEEE
    Volume1

    Conference

    Conference6th International Conference on Transparent Optical Networks, ICTON 2004
    Abbreviated titleICTON
    CountryPoland
    CityWroclaw
    Period4/07/048/07/04

    Keywords

    • IR-48851
    • Focused Ion Beam
    • alignment errors
    • METIS-220625
    • laser interference lithography
    • woodpile structure
    • Photonic crystal slab

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