Abstract
An important requirement in the fabrication of photonic crystal structures is the correct relative alignment of structural elements. Accuracy should be in the order of some tens of nanometres. Some of the options for providing such accuracy are discussed. Examples are given of aligning defects with respect to a predefined 2D lattice, aligning access waveguides with respect to a small local photonic crystal structure, and the alignment of successive periodically structured layers in a 3D "woodpile" structure.
Original language | Undefined |
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Title of host publication | Proceedings of 6th International Conference on Transparent Optical Networks, 2004 |
Publisher | IEEE |
Pages | 260-266 |
Number of pages | 6 |
ISBN (Print) | 0-7803-8343-5 |
DOIs | |
Publication status | Published - 4 Jul 2004 |
Event | 6th International Conference on Transparent Optical Networks, ICTON 2004 - Wroclaw, Poland Duration: 4 Jul 2004 → 8 Jul 2004 Conference number: 6 |
Publication series
Name | |
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Publisher | IEEE |
Volume | 1 |
Conference
Conference | 6th International Conference on Transparent Optical Networks, ICTON 2004 |
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Abbreviated title | ICTON |
Country/Territory | Poland |
City | Wroclaw |
Period | 4/07/04 → 8/07/04 |
Keywords
- IR-48851
- Focused Ion Beam
- alignment errors
- METIS-220625
- laser interference lithography
- woodpile structure
- Photonic crystal slab