Alignment issues in photonic crystal device fabrication

R.M. de Ridder; C.G. Bostan; Frank J. van Soest; V.J. Gadgil

doi:10.1109/ICTON.2004.1360289

Alignment issues in photonic crystal device fabrication

R.M. de Ridder, C.G. Bostan, Frank J. van Soest, V.J. Gadgil

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

An important requirement in the fabrication of photonic crystal structures is the correct relative alignment of structural elements. Accuracy should be in the order of some tens of nanometres. Some of the options for providing such accuracy are discussed. Examples are given of aligning defects with respect to a predefined 2D lattice, aligning access waveguides with respect to a small local photonic crystal structure, and the alignment of successive periodically structured layers in a 3D "woodpile" structure.

Original language	Undefined
Title of host publication	Proceedings of 6th International Conference on Transparent Optical Networks, 2004
Publisher	IEEE
Pages	260-266
Number of pages	6
ISBN (Print)	0-7803-8343-5
DOIs	https://doi.org/10.1109/ICTON.2004.1360289
Publication status	Published - 4 Jul 2004
Event	6th International Conference on Transparent Optical Networks, ICTON 2004 - Wroclaw, Poland Duration: 4 Jul 2004 → 8 Jul 2004 Conference number: 6

Publication series

Name
Publisher	IEEE
Volume	1

Conference

Conference	6th International Conference on Transparent Optical Networks, ICTON 2004
Abbreviated title	ICTON
Country	Poland
City	Wroclaw
Period	4/07/04 → 8/07/04

Keywords

IR-48851
Focused Ion Beam
alignment errors
METIS-220625
laser interference lithography
woodpile structure
Photonic crystal slab

Access to Document

10.1109/ICTON.2004.1360289

01360289
open

Cite this

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title = "Alignment issues in photonic crystal device fabrication",

abstract = "An important requirement in the fabrication of photonic crystal structures is the correct relative alignment of structural elements. Accuracy should be in the order of some tens of nanometres. Some of the options for providing such accuracy are discussed. Examples are given of aligning defects with respect to a predefined 2D lattice, aligning access waveguides with respect to a small local photonic crystal structure, and the alignment of successive periodically structured layers in a 3D {"}woodpile{"} structure.",

keywords = "IR-48851, Focused Ion Beam, alignment errors, METIS-220625, laser interference lithography, woodpile structure, Photonic crystal slab",

author = "{de Ridder}, R.M. and C.G. Bostan and {van Soest}, {Frank J.} and V.J. Gadgil",

year = "2004",

month = jul,

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doi = "10.1109/ICTON.2004.1360289",

language = "Undefined",

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publisher = "IEEE",

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note = "null ; Conference date: 04-07-2004 Through 08-07-2004",

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TY - GEN

T1 - Alignment issues in photonic crystal device fabrication

AU - de Ridder, R.M.

AU - Bostan, C.G.

AU - van Soest, Frank J.

AU - Gadgil, V.J.

N1 - Conference code: 6

PY - 2004/7/4

Y1 - 2004/7/4

N2 - An important requirement in the fabrication of photonic crystal structures is the correct relative alignment of structural elements. Accuracy should be in the order of some tens of nanometres. Some of the options for providing such accuracy are discussed. Examples are given of aligning defects with respect to a predefined 2D lattice, aligning access waveguides with respect to a small local photonic crystal structure, and the alignment of successive periodically structured layers in a 3D "woodpile" structure.

AB - An important requirement in the fabrication of photonic crystal structures is the correct relative alignment of structural elements. Accuracy should be in the order of some tens of nanometres. Some of the options for providing such accuracy are discussed. Examples are given of aligning defects with respect to a predefined 2D lattice, aligning access waveguides with respect to a small local photonic crystal structure, and the alignment of successive periodically structured layers in a 3D "woodpile" structure.

KW - IR-48851

KW - Focused Ion Beam

KW - alignment errors

KW - METIS-220625

KW - laser interference lithography

KW - woodpile structure

KW - Photonic crystal slab

U2 - 10.1109/ICTON.2004.1360289

DO - 10.1109/ICTON.2004.1360289

M3 - Conference contribution

SN - 0-7803-8343-5

SP - 260

EP - 266

BT - Proceedings of 6th International Conference on Transparent Optical Networks, 2004

PB - IEEE

Y2 - 4 July 2004 through 8 July 2004

ER -