AlN thin film unimorph piezoelectric actuators on polysilicon microbridges

S. Saravanan; M. Dijkstra; J.W. Berenschot; G.J.M. Krijnen; M.C. Elwenspoek

AlN thin film unimorph piezoelectric actuators on polysilicon microbridges

S. Saravanan, M. Dijkstra, J.W. Berenschot, G.J.M. Krijnen, M.C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We present a surface micromachining process to fabricate AlN piezoelectric microstructures. The fabrication process utilizes Si02 sacrificial layer etching with Polysilicon as a structural layer. The significance of the process is that the polysilicon layer is used as a structural as weIl as a bottom electrode layer. A thin layer of Cr is used as a mask layer to etch both the AIN and polysilicon layers, while acting as a top electrode. The fabricated clamped-clamped beam microbridges show compressive stress. Preliminary results using phase-shift interferometry measurements show displacements of 8.3nmN on a typical microbridge with dimensions 385 x 50 /-lm.

Original language	English
Title of host publication	Proceedings of the 16th MME MicroMechanics Europe Workshop
Subtitle of host publication	4-6 September 2005, Göteborg, Sweden
Editors	Peter Enoksson
Place of Publication	Göteborg, Sweden
Publisher	Trycket AB, Göteborg
Pages	320-323
Number of pages	4
ISBN (Print)	9-1631-7553-3
Publication status	Published - Sept 2005
Event	16th MicroMechanics Europe Workshop, MME 2005 - Göteborg, Sweden Duration: 4 Sept 2005 → 6 Sept 2005 Conference number: 16

Workshop

Workshop	16th MicroMechanics Europe Workshop, MME 2005
Abbreviated title	MME
Country/Territory	Sweden
City	Göteborg
Period	4/09/05 → 6/09/05

Keywords

RF reactive sputtering
Piezoelectric actuator
Phase-shift interferometry
Alumnum nitride

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Saravanan2005a1nFinal published version, 1.01 MB

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@inproceedings{a9098524252749fd878dbe9dd3ce0160,

title = "AlN thin film unimorph piezoelectric actuators on polysilicon microbridges",

abstract = "We present a surface micromachining process to fabricate AlN piezoelectric microstructures. The fabrication process utilizes Si02 sacrificial layer etching with Polysilicon as a structural layer. The significance of the process is that the polysilicon layer is used as a structural as weIl as a bottom electrode layer. A thin layer of Cr is used as a mask layer to etch both the AIN and polysilicon layers, while acting as a top electrode. The fabricated clamped-clamped beam microbridges show compressive stress. Preliminary results using phase-shift interferometry measurements show displacements of 8.3nmN on a typical microbridge with dimensions 385 x 50 /-lm.",

keywords = "RF reactive sputtering, Piezoelectric actuator, Phase-shift interferometry, Alumnum nitride",

author = "S. Saravanan and M. Dijkstra and J.W. Berenschot and G.J.M. Krijnen and M.C. Elwenspoek",

year = "2005",

month = sep,

language = "English",

isbn = "9-1631-7553-3",

pages = "320--323",

editor = "Peter Enoksson",

booktitle = "Proceedings of the 16th MME MicroMechanics Europe Workshop",

publisher = "Trycket AB, G{\"o}teborg",

note = "16th MicroMechanics Europe Workshop, MME 2005, MME ; Conference date: 04-09-2005 Through 06-09-2005",

}

Saravanan, S, Dijkstra, M, Berenschot, JW , Krijnen, GJM & Elwenspoek, MC 2005, AlN thin film unimorph piezoelectric actuators on polysilicon microbridges. in P Enoksson (ed.), Proceedings of the 16th MME MicroMechanics Europe Workshop: 4-6 September 2005, Göteborg, Sweden. Trycket AB, Göteborg, Göteborg, Sweden, pp. 320-323, 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden, 4/09/05.

AlN thin film unimorph piezoelectric actuators on polysilicon microbridges. / Saravanan, S.; Dijkstra, M.; Berenschot, J.W. et al.
Proceedings of the 16th MME MicroMechanics Europe Workshop: 4-6 September 2005, Göteborg, Sweden. ed. / Peter Enoksson. Göteborg, Sweden: Trycket AB, Göteborg, 2005. p. 320-323.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - AlN thin film unimorph piezoelectric actuators on polysilicon microbridges

AU - Saravanan, S.

AU - Dijkstra, M.

AU - Berenschot, J.W.

AU - Krijnen, G.J.M.

AU - Elwenspoek, M.C.

N1 - Conference code: 16

PY - 2005/9

Y1 - 2005/9

N2 - We present a surface micromachining process to fabricate AlN piezoelectric microstructures. The fabrication process utilizes Si02 sacrificial layer etching with Polysilicon as a structural layer. The significance of the process is that the polysilicon layer is used as a structural as weIl as a bottom electrode layer. A thin layer of Cr is used as a mask layer to etch both the AIN and polysilicon layers, while acting as a top electrode. The fabricated clamped-clamped beam microbridges show compressive stress. Preliminary results using phase-shift interferometry measurements show displacements of 8.3nmN on a typical microbridge with dimensions 385 x 50 /-lm.

AB - We present a surface micromachining process to fabricate AlN piezoelectric microstructures. The fabrication process utilizes Si02 sacrificial layer etching with Polysilicon as a structural layer. The significance of the process is that the polysilicon layer is used as a structural as weIl as a bottom electrode layer. A thin layer of Cr is used as a mask layer to etch both the AIN and polysilicon layers, while acting as a top electrode. The fabricated clamped-clamped beam microbridges show compressive stress. Preliminary results using phase-shift interferometry measurements show displacements of 8.3nmN on a typical microbridge with dimensions 385 x 50 /-lm.

KW - RF reactive sputtering

KW - Piezoelectric actuator

KW - Phase-shift interferometry

KW - Alumnum nitride

M3 - Conference contribution

SN - 9-1631-7553-3

SP - 320

EP - 323

BT - Proceedings of the 16th MME MicroMechanics Europe Workshop

A2 - Enoksson, Peter

PB - Trycket AB, Göteborg

CY - Göteborg, Sweden

T2 - 16th MicroMechanics Europe Workshop, MME 2005

Y2 - 4 September 2005 through 6 September 2005

ER -

AlN thin film unimorph piezoelectric actuators on polysilicon microbridges

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Workshop

Keywords

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