Ambient temperature-gradient compensated low-drift thermopile flow sensor

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

8 Citations (Scopus)
33 Downloads (Pure)

Abstract

A highly-sensitive thermal flow sensor for liquid flow with nl-min-1 resolution has been realised. The sensor consists of freely-suspended silicon-rich silicon-nitride microchannels with integrated Al heater resistors and Al/poly-Si++ thermopiles. The influence of drift in the thin-film metal resistors is effectively eliminated by using thermopiles combined with an adequate measurement method, where the power in the heater resistors is controlled, e.g. constant-power calorimetric method or temperature balancing method. The special meandering layout of the microchannels and the placement of thermopile junctions increases sensitivity by summing the thermopile voltages due to convection by fluid flow, whereas the influence of ambient temperature gradients is compensated for.
Original languageUndefined
Title of host publication22nd IEEE International Conference on MEMS
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages479-482
Number of pages4
ISBN (Print)978-1-4244-2977-6
DOIs
Publication statusPublished - Jan 2009
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 25 Jan 200929 Jan 2009
Conference number: 22

Publication series

Name
PublisherInstitute of Electrical and Electronics Engineers, Inc.

Conference

Conference22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
Abbreviated titleMEMS
CountryItaly
CitySorrento
Period25/01/0929/01/09

Keywords

  • IR-68939
  • EWI-16929
  • TST-SENSORS
  • METIS-264197

Cite this

Dijkstra, M., Lammerink, T. S. J., de Boer, M. J., Wiegerink, R. J., & Elwenspoek, M. C. (2009). Ambient temperature-gradient compensated low-drift thermopile flow sensor. In 22nd IEEE International Conference on MEMS (pp. 479-482). [10.1109/MEMSYS.2009.4805423] Piscataway, NJ: IEEE. https://doi.org/10.1109/MEMSYS.2009.4805423
Dijkstra, Marcel ; Lammerink, Theodorus S.J. ; de Boer, Meint J. ; Wiegerink, Remco J. ; Elwenspoek, Michael Curt. / Ambient temperature-gradient compensated low-drift thermopile flow sensor. 22nd IEEE International Conference on MEMS. Piscataway, NJ : IEEE, 2009. pp. 479-482
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title = "Ambient temperature-gradient compensated low-drift thermopile flow sensor",
abstract = "A highly-sensitive thermal flow sensor for liquid flow with nl-min-1 resolution has been realised. The sensor consists of freely-suspended silicon-rich silicon-nitride microchannels with integrated Al heater resistors and Al/poly-Si++ thermopiles. The influence of drift in the thin-film metal resistors is effectively eliminated by using thermopiles combined with an adequate measurement method, where the power in the heater resistors is controlled, e.g. constant-power calorimetric method or temperature balancing method. The special meandering layout of the microchannels and the placement of thermopile junctions increases sensitivity by summing the thermopile voltages due to convection by fluid flow, whereas the influence of ambient temperature gradients is compensated for.",
keywords = "IR-68939, EWI-16929, TST-SENSORS, METIS-264197",
author = "Marcel Dijkstra and Lammerink, {Theodorus S.J.} and {de Boer}, {Meint J.} and Wiegerink, {Remco J.} and Elwenspoek, {Michael Curt}",
note = "10.1109/MEMSYS.2009.4805423",
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doi = "10.1109/MEMSYS.2009.4805423",
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isbn = "978-1-4244-2977-6",
publisher = "IEEE",
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Dijkstra, M, Lammerink, TSJ, de Boer, MJ, Wiegerink, RJ & Elwenspoek, MC 2009, Ambient temperature-gradient compensated low-drift thermopile flow sensor. in 22nd IEEE International Conference on MEMS., 10.1109/MEMSYS.2009.4805423, IEEE, Piscataway, NJ, pp. 479-482, 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, Sorrento, Italy, 25/01/09. https://doi.org/10.1109/MEMSYS.2009.4805423

Ambient temperature-gradient compensated low-drift thermopile flow sensor. / Dijkstra, Marcel; Lammerink, Theodorus S.J.; de Boer, Meint J.; Wiegerink, Remco J.; Elwenspoek, Michael Curt.

22nd IEEE International Conference on MEMS. Piscataway, NJ : IEEE, 2009. p. 479-482 10.1109/MEMSYS.2009.4805423.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Ambient temperature-gradient compensated low-drift thermopile flow sensor

AU - Dijkstra, Marcel

AU - Lammerink, Theodorus S.J.

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AU - Elwenspoek, Michael Curt

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N2 - A highly-sensitive thermal flow sensor for liquid flow with nl-min-1 resolution has been realised. The sensor consists of freely-suspended silicon-rich silicon-nitride microchannels with integrated Al heater resistors and Al/poly-Si++ thermopiles. The influence of drift in the thin-film metal resistors is effectively eliminated by using thermopiles combined with an adequate measurement method, where the power in the heater resistors is controlled, e.g. constant-power calorimetric method or temperature balancing method. The special meandering layout of the microchannels and the placement of thermopile junctions increases sensitivity by summing the thermopile voltages due to convection by fluid flow, whereas the influence of ambient temperature gradients is compensated for.

AB - A highly-sensitive thermal flow sensor for liquid flow with nl-min-1 resolution has been realised. The sensor consists of freely-suspended silicon-rich silicon-nitride microchannels with integrated Al heater resistors and Al/poly-Si++ thermopiles. The influence of drift in the thin-film metal resistors is effectively eliminated by using thermopiles combined with an adequate measurement method, where the power in the heater resistors is controlled, e.g. constant-power calorimetric method or temperature balancing method. The special meandering layout of the microchannels and the placement of thermopile junctions increases sensitivity by summing the thermopile voltages due to convection by fluid flow, whereas the influence of ambient temperature gradients is compensated for.

KW - IR-68939

KW - EWI-16929

KW - TST-SENSORS

KW - METIS-264197

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Dijkstra M, Lammerink TSJ, de Boer MJ, Wiegerink RJ, Elwenspoek MC. Ambient temperature-gradient compensated low-drift thermopile flow sensor. In 22nd IEEE International Conference on MEMS. Piscataway, NJ: IEEE. 2009. p. 479-482. 10.1109/MEMSYS.2009.4805423 https://doi.org/10.1109/MEMSYS.2009.4805423