Ambient temperature-gradient compensated low-drift thermopile flow sensor

Marcel Dijkstra; Theodorus S.J. Lammerink; Meint J. de Boer; Remco J. Wiegerink; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.2009.4805423

Ambient temperature-gradient compensated low-drift thermopile flow sensor

Marcel Dijkstra, Theodorus S.J. Lammerink, Meint J. de Boer, Remco J. Wiegerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

11 Citations (Scopus)

287 Downloads (Pure)

Abstract

A highly-sensitive thermal flow sensor for liquid flow with nl-min-1 resolution has been realised. The sensor consists of freely-suspended silicon-rich silicon-nitride microchannels with integrated Al heater resistors and Al/poly-Si++ thermopiles. The influence of drift in the thin-film metal resistors is effectively eliminated by using thermopiles combined with an adequate measurement method, where the power in the heater resistors is controlled, e.g. constant-power calorimetric method or temperature balancing method. The special meandering layout of the microchannels and the placement of thermopile junctions increases sensitivity by summing the thermopile voltages due to convection by fluid flow, whereas the influence of ambient temperature gradients is compensated for.

Original language	Undefined
Title of host publication	22nd IEEE International Conference on MEMS
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	479-482
Number of pages	4
ISBN (Print)	978-1-4244-2977-6
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805423
Publication status	Published - Jan 2009
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 25 Jan 2009 → 29 Jan 2009 Conference number: 22

Publication series

Name
Publisher	Institute of Electrical and Electronics Engineers, Inc.

Conference

Conference	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
Abbreviated title	MEMS
Country/Territory	Italy
City	Sorrento
Period	25/01/09 → 29/01/09

Keywords

IR-68939
EWI-16929
TST-SENSORS
METIS-264197

Access to Document

10.1109/MEMSYS.2009.4805423

Cite this

@inproceedings{ff924f09e1184a238a7a92268e3638f2,

title = "Ambient temperature-gradient compensated low-drift thermopile flow sensor",

abstract = "A highly-sensitive thermal flow sensor for liquid flow with nl-min-1 resolution has been realised. The sensor consists of freely-suspended silicon-rich silicon-nitride microchannels with integrated Al heater resistors and Al/poly-Si++ thermopiles. The influence of drift in the thin-film metal resistors is effectively eliminated by using thermopiles combined with an adequate measurement method, where the power in the heater resistors is controlled, e.g. constant-power calorimetric method or temperature balancing method. The special meandering layout of the microchannels and the placement of thermopile junctions increases sensitivity by summing the thermopile voltages due to convection by fluid flow, whereas the influence of ambient temperature gradients is compensated for.",

keywords = "IR-68939, EWI-16929, TST-SENSORS, METIS-264197",

author = "Marcel Dijkstra and Lammerink, {Theodorus S.J.} and {de Boer}, {Meint J.} and Wiegerink, {Remco J.} and Elwenspoek, {Michael Curt}",

note = "10.1109/MEMSYS.2009.4805423 ; 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 ; Conference date: 25-01-2009 Through 29-01-2009",

year = "2009",

month = jan,

doi = "10.1109/MEMSYS.2009.4805423",

language = "Undefined",

isbn = "978-1-4244-2977-6",

publisher = "IEEE",

pages = "479--482",

booktitle = "22nd IEEE International Conference on MEMS",

address = "United States",

}

Dijkstra, M, Lammerink, TSJ, de Boer, MJ, Wiegerink, RJ & Elwenspoek, MC 2009, Ambient temperature-gradient compensated low-drift thermopile flow sensor. in 22nd IEEE International Conference on MEMS., 10.1109/MEMSYS.2009.4805423, IEEE, Piscataway, NJ, pp. 479-482, 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, Sorrento, Italy, 25/01/09. https://doi.org/10.1109/MEMSYS.2009.4805423

Ambient temperature-gradient compensated low-drift thermopile flow sensor. / Dijkstra, Marcel; Lammerink, Theodorus S.J.; de Boer, Meint J. et al.
22nd IEEE International Conference on MEMS. Piscataway, NJ: IEEE, 2009. p. 479-482 10.1109/MEMSYS.2009.4805423.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Ambient temperature-gradient compensated low-drift thermopile flow sensor

AU - Dijkstra, Marcel

AU - Lammerink, Theodorus S.J.

AU - de Boer, Meint J.

AU - Wiegerink, Remco J.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 22

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N2 - A highly-sensitive thermal flow sensor for liquid flow with nl-min-1 resolution has been realised. The sensor consists of freely-suspended silicon-rich silicon-nitride microchannels with integrated Al heater resistors and Al/poly-Si++ thermopiles. The influence of drift in the thin-film metal resistors is effectively eliminated by using thermopiles combined with an adequate measurement method, where the power in the heater resistors is controlled, e.g. constant-power calorimetric method or temperature balancing method. The special meandering layout of the microchannels and the placement of thermopile junctions increases sensitivity by summing the thermopile voltages due to convection by fluid flow, whereas the influence of ambient temperature gradients is compensated for.

AB - A highly-sensitive thermal flow sensor for liquid flow with nl-min-1 resolution has been realised. The sensor consists of freely-suspended silicon-rich silicon-nitride microchannels with integrated Al heater resistors and Al/poly-Si++ thermopiles. The influence of drift in the thin-film metal resistors is effectively eliminated by using thermopiles combined with an adequate measurement method, where the power in the heater resistors is controlled, e.g. constant-power calorimetric method or temperature balancing method. The special meandering layout of the microchannels and the placement of thermopile junctions increases sensitivity by summing the thermopile voltages due to convection by fluid flow, whereas the influence of ambient temperature gradients is compensated for.

KW - IR-68939

KW - EWI-16929

KW - TST-SENSORS

KW - METIS-264197

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DO - 10.1109/MEMSYS.2009.4805423

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BT - 22nd IEEE International Conference on MEMS

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