Ambient temperature-gradient compensated low-drift thermopile flow sensor

Marcel Dijkstra, Theodorus S.J. Lammerink, Meint J. de Boer, Remco J. Wiegerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    9 Citations (Scopus)
    198 Downloads (Pure)


    A highly-sensitive thermal flow sensor for liquid flow with nl-min-1 resolution has been realised. The sensor consists of freely-suspended silicon-rich silicon-nitride microchannels with integrated Al heater resistors and Al/poly-Si++ thermopiles. The influence of drift in the thin-film metal resistors is effectively eliminated by using thermopiles combined with an adequate measurement method, where the power in the heater resistors is controlled, e.g. constant-power calorimetric method or temperature balancing method. The special meandering layout of the microchannels and the placement of thermopile junctions increases sensitivity by summing the thermopile voltages due to convection by fluid flow, whereas the influence of ambient temperature gradients is compensated for.
    Original languageUndefined
    Title of host publication22nd IEEE International Conference on MEMS
    Place of PublicationPiscataway, NJ
    Number of pages4
    ISBN (Print)978-1-4244-2977-6
    Publication statusPublished - Jan 2009
    Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
    Duration: 25 Jan 200929 Jan 2009
    Conference number: 22

    Publication series

    PublisherInstitute of Electrical and Electronics Engineers, Inc.


    Conference22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
    Abbreviated titleMEMS


    • IR-68939
    • EWI-16929
    • METIS-264197

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