Amplitude-modulated electro-mechanical feedback system for silicon condenser microphones

A.G.H. van der Donk; P.R. Scheeper; W. Olthuis; P. Bergveld

doi:10.1088/0960-1317/2/3/024

Amplitude-modulated electro-mechanical feedback system for silicon condenser microphones

A.G.H. van der Donk, P.R. Scheeper, W. Olthuis, P. Bergveld

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

For silicon condenser microphones, narrowing the air gap as a part of the miniaturization process causes a reduction of the bandwidth of the microphone. By introducing an actuator electrode on the diaphragm for electro-mechanical feedback, it is possible to increase the bandwidth of condenser microphones with a narrow air gap. A feedback system is presented, which uses an amplitude-modulated actuator signal with a carrier frequency far above the audio-frequency range. With feedback, the bandwidth of the microphone is increased by at least a factor 10.

Original language	English
Pages (from-to)	211-214
Number of pages	4
Journal	Journal of micromechanics and microengineering
Volume	2
Issue number	3
DOIs	https://doi.org/10.1088/0960-1317/2/3/024
Publication status	Published - 1992

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10.1088/0960-1317/2/3/024

VanderDonk1992amplitudeFinal published version, 195 KB

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Amplitude-modulated electro-mechanical feedback system for silicon condenser microphones
van der Donk, A. G. H., Scheeper, P. R., Olthuis, W. & Bergveld, P., 1 Jun 1992.
Research output: Contribution to conference › Poster › Other research output

Cite this

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abstract = "For silicon condenser microphones, narrowing the air gap as a part of the miniaturization process causes a reduction of the bandwidth of the microphone. By introducing an actuator electrode on the diaphragm for electro-mechanical feedback, it is possible to increase the bandwidth of condenser microphones with a narrow air gap. A feedback system is presented, which uses an amplitude-modulated actuator signal with a carrier frequency far above the audio-frequency range. With feedback, the bandwidth of the microphone is increased by at least a factor 10.",

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AB - For silicon condenser microphones, narrowing the air gap as a part of the miniaturization process causes a reduction of the bandwidth of the microphone. By introducing an actuator electrode on the diaphragm for electro-mechanical feedback, it is possible to increase the bandwidth of condenser microphones with a narrow air gap. A feedback system is presented, which uses an amplitude-modulated actuator signal with a carrier frequency far above the audio-frequency range. With feedback, the bandwidth of the microphone is increased by at least a factor 10.

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