Abstract
For silicon condenser microphones, narrowing the air gap as a part of the miniaturization process causes a reduction of the bandwidth of the microphone. By introducing an actuator electrode on the diaphragm for electro-mechanical feedback, it is possible to increase the bandwidth of condenser microphones with a narrow air gap. A feedback system is presented, which uses an amplitude-modulated actuator signal with a carrier frequency far above the audio-frequency range. With feedback, the bandwidth of the microphone is increased by at least a factor 10.
| Original language | English |
|---|---|
| Pages (from-to) | 211-214 |
| Number of pages | 4 |
| Journal | Journal of micromechanics and microengineering |
| Volume | 2 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 1992 |
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Dive into the research topics of 'Amplitude-modulated electro-mechanical feedback system for silicon condenser microphones'. Together they form a unique fingerprint.Research output
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Amplitude-modulated electro-mechanical feedback system for silicon condenser microphones
van der Donk, A. G. H., Scheeper, P. R., Olthuis, W. & Bergveld, P., 1 Jun 1992.Research output: Contribution to conference › Poster › Other research output
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