An AFM-based device for in-situ characterization of nano-wear

S. Deladi, J.W. Berenschot, M.J. de Boer, G.J.M. Krijnen, M.C. Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    5 Citations (Scopus)
    2 Downloads (Pure)

    Abstract

    An innovative tool has been developed to investigate in-situ monitoring of surface modification, which can be used in standard Atomic Force Microscopes (AFM). The device enables detection of topography modification on nanometer scale lateral- and subnanometer vertical resolution, which is important for reliability studies of MEMS and NEMS, where small moving parts may contact each other leading to wear. The novelty of the device is that surface modification (e.g. wear) is generated in a controlled way with a multifunctional cantilever and it is identified in-situ, the detection and the surface modification being decoupled but embedded in one and the same device.
    Original languageEnglish
    Title of host publication17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004)
    Place of PublicationLos Alamitos, CA
    PublisherIEEE
    Pages181-184
    Number of pages4
    ISBN (Print)9780780382657
    DOIs
    Publication statusPublished - 2004
    Event17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004 - Maastricht, Netherlands
    Duration: 25 Jan 200429 Jan 2004
    Conference number: 17

    Conference

    Conference17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004
    Abbreviated titleMEMS
    CountryNetherlands
    CityMaastricht
    Period25/01/0429/01/04

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