An AFM-based device for in-situ characterization of nano-wear

S. Deladi; J.W. Berenschot; M.J. de Boer; G.J.M. Krijnen; M.C. Elwenspoek

doi:10.1109/MEMS.2004.1290552

An AFM-based device for in-situ characterization of nano-wear

S. Deladi, J.W. Berenschot, M.J. de Boer, G.J.M. Krijnen, M.C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

5 Citations (Scopus)

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Abstract

An innovative tool has been developed to investigate in-situ monitoring of surface modification, which can be used in standard Atomic Force Microscopes (AFM). The device enables detection of topography modification on nanometer scale lateral- and subnanometer vertical resolution, which is important for reliability studies of MEMS and NEMS, where small moving parts may contact each other leading to wear. The novelty of the device is that surface modification (e.g. wear) is generated in a controlled way with a multifunctional cantilever and it is identified in-situ, the detection and the surface modification being decoupled but embedded in one and the same device.

Original language	English
Title of host publication	17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004)
Place of Publication	Los Alamitos, CA
Publisher	IEEE
Pages	181-184
Number of pages	4
ISBN (Print)	9780780382657
DOIs	https://doi.org/10.1109/MEMS.2004.1290552
Publication status	Published - 2004
Event	17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004 - Maastricht, Netherlands Duration: 25 Jan 2004 → 29 Jan 2004 Conference number: 17

Conference

Conference	17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004
Abbreviated title	MEMS
Country/Territory	Netherlands
City	Maastricht
Period	25/01/04 → 29/01/04

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10.1109/MEMS.2004.1290552

Cite this

@inproceedings{33d4986c898e4af3b90663c395dc3547,

title = "An AFM-based device for in-situ characterization of nano-wear",

abstract = "An innovative tool has been developed to investigate in-situ monitoring of surface modification, which can be used in standard Atomic Force Microscopes (AFM). The device enables detection of topography modification on nanometer scale lateral- and subnanometer vertical resolution, which is important for reliability studies of MEMS and NEMS, where small moving parts may contact each other leading to wear. The novelty of the device is that surface modification (e.g. wear) is generated in a controlled way with a multifunctional cantilever and it is identified in-situ, the detection and the surface modification being decoupled but embedded in one and the same device.",

author = "S. Deladi and J.W. Berenschot and {de Boer}, M.J. and G.J.M. Krijnen and M.C. Elwenspoek",

year = "2004",

doi = "10.1109/MEMS.2004.1290552",

language = "English",

isbn = "9780780382657",

pages = "181--184",

booktitle = "17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004)",

publisher = "IEEE",

note = "17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004, MEMS ; Conference date: 25-01-2004 Through 29-01-2004",

}

Deladi, S, Berenschot, JW, de Boer, MJ, Krijnen, GJM & Elwenspoek, MC 2004, An AFM-based device for in-situ characterization of nano-wear. in 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004). IEEE, Los Alamitos, CA, pp. 181-184, 17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004, Maastricht, Netherlands, 25/01/04. https://doi.org/10.1109/MEMS.2004.1290552

TY - GEN

T1 - An AFM-based device for in-situ characterization of nano-wear

AU - Deladi, S.

AU - Berenschot, J.W.

AU - de Boer, M.J.

AU - Krijnen, G.J.M.

AU - Elwenspoek, M.C.

N1 - Conference code: 17

PY - 2004

Y1 - 2004

N2 - An innovative tool has been developed to investigate in-situ monitoring of surface modification, which can be used in standard Atomic Force Microscopes (AFM). The device enables detection of topography modification on nanometer scale lateral- and subnanometer vertical resolution, which is important for reliability studies of MEMS and NEMS, where small moving parts may contact each other leading to wear. The novelty of the device is that surface modification (e.g. wear) is generated in a controlled way with a multifunctional cantilever and it is identified in-situ, the detection and the surface modification being decoupled but embedded in one and the same device.

AB - An innovative tool has been developed to investigate in-situ monitoring of surface modification, which can be used in standard Atomic Force Microscopes (AFM). The device enables detection of topography modification on nanometer scale lateral- and subnanometer vertical resolution, which is important for reliability studies of MEMS and NEMS, where small moving parts may contact each other leading to wear. The novelty of the device is that surface modification (e.g. wear) is generated in a controlled way with a multifunctional cantilever and it is identified in-situ, the detection and the surface modification being decoupled but embedded in one and the same device.

U2 - 10.1109/MEMS.2004.1290552

DO - 10.1109/MEMS.2004.1290552

M3 - Conference contribution

SN - 9780780382657

SP - 181

EP - 184

BT - 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004)

PB - IEEE

CY - Los Alamitos, CA

T2 - 17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004

Y2 - 25 January 2004 through 29 January 2004

ER -

An AFM-based device for in-situ characterization of nano-wear

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