An AFM-based device for in-situ characterization of nano-wear

S. Deladi, N.R. Tas, J.W. Berenschot, M.J. de Boer, G.J.M. Krijnen, M.C. Elwenspoek

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 13 May 2004
Event	Veeco Instruments Scanning Probe Microscopy applications Conference and Users Meeting 2004 - Eindhoven, Netherlands Duration: 13 May 2004 → 14 May 2004

Conference	Veeco Instruments Scanning Probe Microscopy applications Conference and Users Meeting 2004
Country/Territory	Netherlands
City	Eindhoven
Period	13/05/04 → 14/05/04

Cite this

@conference{9d92d11165e5417689d5a9c80fc75cec,

title = "An AFM-based device for in-situ characterization of nano-wear",

author = "S. Deladi and N.R. Tas and J.W. Berenschot and {de Boer}, M.J. and G.J.M. Krijnen and M.C. Elwenspoek",

year = "2004",

month = may,

day = "13",

language = "English",

note = "Veeco Instruments Scanning Probe Microscopy applications Conference and Users Meeting 2004 ; Conference date: 13-05-2004 Through 14-05-2004",

}

TY - CONF

T1 - An AFM-based device for in-situ characterization of nano-wear

AU - Deladi, S.

AU - Tas, N.R.

AU - Berenschot, J.W.

AU - de Boer, M.J.

AU - Krijnen, G.J.M.

AU - Elwenspoek, M.C.

PY - 2004/5/13

Y1 - 2004/5/13

M3 - Poster

T2 - Veeco Instruments Scanning Probe Microscopy applications Conference and Users Meeting 2004

Y2 - 13 May 2004 through 14 May 2004

ER -