An Alternative Method of Fabricating Sub-Micron Resolution Masks Using Excimer Laser Ablation

C.J. Hayden, Jan C.T. Eijkel, C. Dalton

    Research output: Contribution to journalArticleAcademicpeer-review

    2 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)826-831
    Number of pages6
    JournalJournal of micromechanics and microengineering
    Volume14
    Publication statusPublished - 2004

    Keywords

    • METIS-219776

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