An analytical kinetic model for chemical-vapor deposition of pureB layers from diborane

V. Mohammadi*, W. B. De Boer, L. K. Nanver

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

21 Citations (Scopus)
41 Downloads (Pure)

Fingerprint

Dive into the research topics of 'An analytical kinetic model for chemical-vapor deposition of pureB layers from diborane'. Together they form a unique fingerprint.

Physics & Astronomy