An electrochemical microactuator: Principle and first results

Cristina Neagu, C.R. Rusu, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, John J. Kelly

Research output: Contribution to journalArticle

  • 87 Citations

Abstract

A novel electrochemical microactuator made with the use of silicon micromachining techniques, and its feasibility, are presented. Gas pressure is generated by electrolysis of an aqueous electrolyte solution. The pressure built up is used to change the deflection of a membrane. The actuator has three states: the electrolysis state, in which the pressure is built up; the passive state, in which the circuit is open and the pressure is maintained; and the pressure reduction state, in which the electrodes are short-circuited in order to reverse the electrolysis reaction. The advantage of this type of actuation is a relatively large pressure generation with low energy consumption. Power is required only for pressure build-up and for changing the states. Therefore, this type of actuation has promising applications in pumps or active valves.
LanguageUndefined
Pages2-9
Number of pages8
JournalJournal of microelectromechanical systems
Volume5
Issue number1
DOIs
StatePublished - Mar 1996

Keywords

  • METIS-111498
  • IR-14222
  • EWI-13568

Cite this

@article{7f252eb4520e456a97aa61860c61d237,
title = "An electrochemical microactuator: Principle and first results",
abstract = "A novel electrochemical microactuator made with the use of silicon micromachining techniques, and its feasibility, are presented. Gas pressure is generated by electrolysis of an aqueous electrolyte solution. The pressure built up is used to change the deflection of a membrane. The actuator has three states: the electrolysis state, in which the pressure is built up; the passive state, in which the circuit is open and the pressure is maintained; and the pressure reduction state, in which the electrodes are short-circuited in order to reverse the electrolysis reaction. The advantage of this type of actuation is a relatively large pressure generation with low energy consumption. Power is required only for pressure build-up and for changing the states. Therefore, this type of actuation has promising applications in pumps or active valves.",
keywords = "METIS-111498, IR-14222, EWI-13568",
author = "Cristina Neagu and C.R. Rusu and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt} and Kelly, {John J.}",
year = "1996",
month = "3",
doi = "10.1109/84.485209",
language = "Undefined",
volume = "5",
pages = "2--9",
journal = "Journal of microelectromechanical systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers",
number = "1",

}

An electrochemical microactuator: Principle and first results. / Neagu, Cristina; Rusu, C.R.; Gardeniers, Johannes G.E.; Elwenspoek, Michael Curt; Kelly, John J.

In: Journal of microelectromechanical systems, Vol. 5, No. 1, 03.1996, p. 2-9.

Research output: Contribution to journalArticle

TY - JOUR

T1 - An electrochemical microactuator: Principle and first results

AU - Neagu,Cristina

AU - Rusu,C.R.

AU - Gardeniers,Johannes G.E.

AU - Elwenspoek,Michael Curt

AU - Kelly,John J.

PY - 1996/3

Y1 - 1996/3

N2 - A novel electrochemical microactuator made with the use of silicon micromachining techniques, and its feasibility, are presented. Gas pressure is generated by electrolysis of an aqueous electrolyte solution. The pressure built up is used to change the deflection of a membrane. The actuator has three states: the electrolysis state, in which the pressure is built up; the passive state, in which the circuit is open and the pressure is maintained; and the pressure reduction state, in which the electrodes are short-circuited in order to reverse the electrolysis reaction. The advantage of this type of actuation is a relatively large pressure generation with low energy consumption. Power is required only for pressure build-up and for changing the states. Therefore, this type of actuation has promising applications in pumps or active valves.

AB - A novel electrochemical microactuator made with the use of silicon micromachining techniques, and its feasibility, are presented. Gas pressure is generated by electrolysis of an aqueous electrolyte solution. The pressure built up is used to change the deflection of a membrane. The actuator has three states: the electrolysis state, in which the pressure is built up; the passive state, in which the circuit is open and the pressure is maintained; and the pressure reduction state, in which the electrodes are short-circuited in order to reverse the electrolysis reaction. The advantage of this type of actuation is a relatively large pressure generation with low energy consumption. Power is required only for pressure build-up and for changing the states. Therefore, this type of actuation has promising applications in pumps or active valves.

KW - METIS-111498

KW - IR-14222

KW - EWI-13568

U2 - 10.1109/84.485209

DO - 10.1109/84.485209

M3 - Article

VL - 5

SP - 2

EP - 9

JO - Journal of microelectromechanical systems

T2 - Journal of microelectromechanical systems

JF - Journal of microelectromechanical systems

SN - 1057-7157

IS - 1

ER -